Waste ITO target recycling method
A target and intermediate technology, applied in the field of ITO targets, can solve the problems of uncontrollable vaporization effect and uncontrollable quality of target recovery effect, and achieve high cooling efficiency
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[0014] In order to deepen the understanding of the present invention, the present invention will be further described below in conjunction with the examples, which are only used to explain the present invention, and do not constitute a limitation to the protection scope of the present invention.
[0015] This embodiment provides a method for recycling waste ITO targets, including the following steps:
[0016] Step 1: Put the waste ITO target into the gasification furnace, and the temperature of the gasification furnace rises in a gradient: 0-30min to 500°C, then keep warm, 30-40min to 3000°C, put the ITO waste target at this temperature, 40 -60min to raise the temperature to 4000-5000°C, then keep it warm until the ITO waste target is completely vaporized, and finally cool it under nitrogen atmosphere. The nitrogen gas filling rate is 6L / min for 0-3min, and then the filling rate is 2L / min to obtain a purity of 4N. , ITO powder with a specific surface area of 6-8;
[0017] S...
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