A data processing method for integrated circuit manufacturing
An integrated circuit and data processing technology, applied in image data processing, details involving image stitching, image analysis, etc., can solve problems such as eye fatigue and missed detection
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[0081] The data processing method used in the present invention is based on the data processing method combining image detection and laser detection; specifically, the image detection image and the line laser detection image of the integrated circuit board are obtained from the image detection group and the line laser detection group, and the specific image detection group And the line laser inspection group is used to detect the defects of the integrated circuit board. The image detection group includes several optical imaging devices and at least one LED surface light source, which are used to photograph different areas of the integrated circuit board, and are used to construct large pixel mosaic images. The line laser detection group includes at least one optical imaging device and at least one line laser detection light source.
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