Device for adjusting density of lead-out particles by adjusting position of coupling coil
A technology of coupled coils and particle density, applied in the direction of plasma, electrical components, etc., can solve the problems of inconvenient adjustment, and achieve the effect of avoiding impact, reducing complexity, and reducing the requirements for adjustment response
Pending Publication Date: 2021-09-17
HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
0 Cites 2 Cited by
AI-Extracted Technical Summary
Problems solved by technology
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreMethod used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreAbstract
The invention discloses a device for adjusting the density of lead-out particles by adjusting the position of a coupling coil. The device comprises a discharge cavity, an upper transition flange, a lower transition flange, the coupling coil, an insulating part, a coil support, a stepping motor, a gear set, a sliding rail, a flexible cable, a radio frequency power source and an impedance matching network. The relative positions of the coupling coil and the discharging cavity are not fixed, the coupling coil is connected with the coil support through the insulating part, the coil support accommodates the installation positions of the stepping motor and the gear set at the same time, and the axial movement of the coupling coil in the discharging cavity is adjusted by controlling the movement of the stepping motor on the sliding rail. And the density of the plasma near the lower transition flange is adjusted to realize the density adjustment of the lead-out particles. The coupling coil is connected with the impedance matching network through a flexible cable. The requirement for radio frequency power source adjustment response is lowered, the adjustment range needed by the impedance matching network is reduced, the stability of radio frequency plasma discharge is enhanced, and the complexity of system operation is lowered.
Application Domain
Technology Topic
Image
Examples
- Experimental program(1)
Example Embodiment
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more PUM


Description & Claims & Application Information
We can also present the details of the Description, Claims and Application information to help users get a comprehensive understanding of the technical details of the patent, such as background art, summary of invention, brief description of drawings, description of embodiments, and other original content. On the other hand, users can also determine the specific scope of protection of the technology through the list of claims; as well as understand the changes in the life cycle of the technology with the presentation of the patent timeline. Login to view more.
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more Similar technology patents
Suspended particle-system solar thermochemical reactor having function of preventing particle from blocking and adhering to optical window
InactiveCN104474993AAvoid leakage of metal oxide particlesAvoid shockSolar heating energySolar heat devicesPhysicsSpray nozzle
Owner:HARBIN INST OF TECH AT WEIHAI
Intelligent water supply system
InactiveCN103132558AAvoid shockExtended service lifeService pipe systemsWater mainsWater pipePower grid
Owner:QINGDAO RUIFENG GAS
Main silencer for air exhaust system of automotive engine
ActiveCN102146826AAvoid shockReduce vibrationSilencing apparatusMachines/enginesMesh gridProduct gas
Owner:CHONGQING CHANGAN AUTOMOBILE CO LTD
Business service quality assurance method and operation service system
InactiveCN102781046AAvoid shockImprove satisfactionNetwork traffic/resource managementConnection managementService systemNetwork congestion
Owner:CHINA UNITED NETWORK COMM GRP CO LTD
Vehicle-mounted battery installation platform
InactiveCN104723304AAvoid shockRealize the adjustment of spatial postureWork benchesButt jointLinkage concept
Owner:王昕
Classification and recommendation of technical efficacy words
- Avoid shock
File data distributing method and relative device
ActiveCN101051980AImprove the dividing speedAvoid shockData switching by path configurationElectric digital data processingClient-sideDistributed computing
Owner:HUAWEI TECH CO LTD
Fluid pressure circuit, energy recovery device, and fluid pressure recovery circuit for working machine
InactiveCN101091065AAvoid shockSuppression of sudden load fluctuationsServomotorsSoil-shifting machines/dredgersFluid pressureControl circuit
Owner:SHIN CATERPILLAR MITSUBISHI LTD CORP
Multistage intelligent charging method
ActiveCN103700901AExtend battery lifeAvoid shockSecondary cells charging/dischargingElectric powerCharge currentConstant voltage
Owner:SHANGHAI POWER STATION
Link aggregation method and access equipment
ActiveCN103401707AGuaranteed reliabilityAvoid shockData switching networksNetwork access serverElectricity
Owner:NEW H3C TECH CO LTD