Device for adjusting density of lead-out particles by adjusting position of coupling coil

[0021] The present invention will be described in detail below with reference to the accompanying drawings and specific examples. However, the following examples are limited to the appended claims, and the scope of the invention should include all the contents of the claims, and those skilled in the art can completely implement the entire contents of the present invention by those skilled in the art.

[0022] figure 1 An adjustable coupled radio frequency ion source is an adjustable coupled radio frequency ion source. like figure 1 As shown, the coil position adjustable inductive coupling frequency ion source includes a discharge chamber 1, an upper transition flange 2, a lower transition flange 3, a coupling coil 4, an insulating member 5, a coil bracket 6, a stepping motor, and a gear set 7, Slide rail 8, flexible cable 9, RF power source, and impedance matching network, etc. Plasma is mainly produced in the discharge chamber 1. The upper end of the discharge cavity 1 is provided with a transition flange 2, and the lower end is provided with a transition flange 3. The upper transition flange 2 and the lower transition flange 3 are closely contacted with the discharge chamber 1, and the discharge cavity 1 is inside and outside. Air isolated. The upper transition flange 2 is the instrument control and intake interface, and the lower transition flange 3 is a particle leader. The coupling coil 4 has several turns, wound around the outer wall of the discharge chamber. One end of the coupling coil 4 is tightly connected to one insulating member 5, and the other end of the coupling coil 4 is tightly connected to the other insulating member 5. Each insulating member 5 is closely connected to the coil bracket 6. The coupling coil 4 is connected to the impedance matching network using a flexible cable 9. The coupling coil 4 is secured together by the coil holder 6, and the stepping motor is connected to the rail 8 through the gear set, and the coil holder 6 simultaneously accommodates the stepper motor and the gear set 7, and the stepping motor drives the gear set to drive The coil bracket 6 is moved on the slide rail 8, thereby controlling the coupling coil 4 to move the discharge chamber 1 in the axial direction of the discharge chamber 1, alter the plasma density near the transition flange 3. The positional adjustment of the discharge cavity 1 requires remote control to ensure the security of the operation. The RF power source and impedance matching network is used in conjunction with a cable connection.

[0023] A certain gap is retained between the coupling coil 4 and the discharge chamber 1, and the rail 8 is arranged in parallel with the discharge chamber 1 axis, and the coupling coil 4 does not force the discharge chamber 1 to move to ensure its septality.

[0024] The coil bracket 6 and the insulating member 5 use a rigid material to ensure the effectiveness and real time of the stepper motor drive.

[0025] The movement on the slide rail 8 includes, but is not limited to, mounting a stepping motor on a coil holder 6, and mounting the rail 8 on the coil bracket 6. Or secure the stepping motor to other objects, replace the rail 8 with the stepping motor into a combination of the screw and the motor, and the coil holder 6 moves on the screw.

[0026] The coupling coil 4 is moved against the discharge chamber 1 axial direction, including, but not limited to, using a flexible cable connection using the coupling coil 4 and the impedance matching network, or other deformable mechanical structures to ensure the coupling coil motion Normal transmission of RF power.

[0027] The remote control includes a signal of a stepping motor to transmit to a stepper motor through an optical fiber to prevent interference of RF electromagnetic fields.

[0028] figure 1 In the discharge chamber 1, the main area of ​​radio frequency plasma discharge is mainly concentrated in the geometric center of the discharge cavity and the coupling coil. Upper transition flange 2, under the transition flange 3, is the export of particles. The coupling coil 4 is not fixed between the discharge cavity 11. The insulating member 5 acts as a rigid connection coupling coil 4 and the coil holder 6, preventing the RF power on the coupling coil 4 affects the step motor and the control system. The coil bracket 6 serves as a fixed coil position and the housing of the stepping motor and the gear set 7. Stepping motor and gear set 7, providing power to adjustment of the position of the coupling coil. The slide rail 8 is typically fixed on the bracket of the experimental device, and the gear can adjust the coil 4 position on the rail 8. Flexible cable 9, connection impedance matching network and coupling coils, to ensure the active space of the coupling coil 4 under the premise of radio frequency power transmission is not affected.

[0029] The principle and method of use of the device are: in the process of inductive coupling radio frequency plasma discharge and lead, the plasma density near the lower transition flange 3 has a decisive effect on the density of the leading particles, and the plasma density near the transition flange 3 The distance between the transition flange 3 is negatively correlated with the distance of the coupling coil 4. When adjusting the extraction of the particle density, the rotation of the stepper motor is controlled by the remote control system, and the stepping motor drives the gear set on the slide rail 8 to drive The coupling coil 4 moves in the direction of the arrow (the axial direction of the discharge cavity 1), and adjusts the lead particle density.

[0030]The embodiments described above are merely described in the preferred embodiments of the present invention, and preferred embodiments have not detailed all of the details, nailing to limit the invention.In the premise of not departing from the spirit of the invention, various modifications and modifications of the technical solutions of the present invention have been set within the scope of protection determined by the claims of the invention.