Device for adjusting density of lead-out particles by adjusting position of coupling coil

A technology of coupled coils and particle density, applied in the direction of plasma, electrical components, etc., can solve the problems of inconvenient adjustment, and achieve the effect of avoiding impact, reducing complexity, and reducing the requirements for adjustment response

Pending Publication Date: 2021-09-17
HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
0 Cites 2 Cited by

AI-Extracted Technical Summary

Problems solved by technology

[0009] The purpose of the present invention is to provide a device for adjusting the position of the coupling coil to adjust the density of the extracted particles, which is used to solve the problem of inconvenient adjustment of the density of the extracted particles on the current equipment, and can adjust the position of the central area of ​​the inductively coupled radio frequency plasma discharge relative to the extracted electrode , so as to achieve the adjustment of the density of the extracted ...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Method used

A certain gap is reserved between the coupling coil 4 and the discharge chamber 1, the slide rail 8 is arranged in parallel with the discharge chamber 1 axis, the displacement of the discharge chamber 1 can not be forced during the coupling coil 4 movement process, and its airtightness is guaranteed sex.
[0022] Fig. 1 is a schematic diagram of an inductively coupled radio frequency ion source with an adjustable coil position. As shown in Figure 1, the coil position adjustable inductively coupled RF ion source includes a discharge chamber 1, an upper transition flange 2, a lower transition flange 3, a coupling coil 4, an insulating component 5, a coil support 6, a stepping motor and gears Group 7, slide rail 8, flexible cable 9, radio frequency power source and impedance matching network, etc. Plasma is mainly generated in the discharge chamber 1 . The upper end of the discharge chamber 1 is provided with an upper transition flange 2, and the lower end is provided with a lower transition flange 3. Both the upper transition flange 2 and the lower transition flange 3 are in close contact with the discharge chamber 1, and the inside and outside of the discharge chamber 1 Air isolation. The upper transition flange 2 is the instrument control and air intake interface, and the lower transition flange 3 is the particle extraction interface. The coupling coil 4 has several turns and is wound on the outer wall of the discharge chamber 1 . One end of the coupling coil 4 is tightl...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Abstract

The invention discloses a device for adjusting the density of lead-out particles by adjusting the position of a coupling coil. The device comprises a discharge cavity, an upper transition flange, a lower transition flange, the coupling coil, an insulating part, a coil support, a stepping motor, a gear set, a sliding rail, a flexible cable, a radio frequency power source and an impedance matching network. The relative positions of the coupling coil and the discharging cavity are not fixed, the coupling coil is connected with the coil support through the insulating part, the coil support accommodates the installation positions of the stepping motor and the gear set at the same time, and the axial movement of the coupling coil in the discharging cavity is adjusted by controlling the movement of the stepping motor on the sliding rail. And the density of the plasma near the lower transition flange is adjusted to realize the density adjustment of the lead-out particles. The coupling coil is connected with the impedance matching network through a flexible cable. The requirement for radio frequency power source adjustment response is lowered, the adjustment range needed by the impedance matching network is reduced, the stability of radio frequency plasma discharge is enhanced, and the complexity of system operation is lowered.

Application Domain

Technology Topic

Image

  • Device for adjusting density of lead-out particles by adjusting position of coupling coil

Examples

  • Experimental program(1)

Example Embodiment

[0021] The present invention will be described in detail below with reference to the accompanying drawings and specific examples. However, the following examples are limited to the appended claims, and the scope of the invention should include all the contents of the claims, and those skilled in the art can completely implement the entire contents of the present invention by those skilled in the art.
[0022] figure 1 An adjustable coupled radio frequency ion source is an adjustable coupled radio frequency ion source. like figure 1 As shown, the coil position adjustable inductive coupling frequency ion source includes a discharge chamber 1, an upper transition flange 2, a lower transition flange 3, a coupling coil 4, an insulating member 5, a coil bracket 6, a stepping motor, and a gear set 7, Slide rail 8, flexible cable 9, RF power source, and impedance matching network, etc. Plasma is mainly produced in the discharge chamber 1. The upper end of the discharge cavity 1 is provided with a transition flange 2, and the lower end is provided with a transition flange 3. The upper transition flange 2 and the lower transition flange 3 are closely contacted with the discharge chamber 1, and the discharge cavity 1 is inside and outside. Air isolated. The upper transition flange 2 is the instrument control and intake interface, and the lower transition flange 3 is a particle leader. The coupling coil 4 has several turns, wound around the outer wall of the discharge chamber. One end of the coupling coil 4 is tightly connected to one insulating member 5, and the other end of the coupling coil 4 is tightly connected to the other insulating member 5. Each insulating member 5 is closely connected to the coil bracket 6. The coupling coil 4 is connected to the impedance matching network using a flexible cable 9. The coupling coil 4 is secured together by the coil holder 6, and the stepping motor is connected to the rail 8 through the gear set, and the coil holder 6 simultaneously accommodates the stepper motor and the gear set 7, and the stepping motor drives the gear set to drive The coil bracket 6 is moved on the slide rail 8, thereby controlling the coupling coil 4 to move the discharge chamber 1 in the axial direction of the discharge chamber 1, alter the plasma density near the transition flange 3. The positional adjustment of the discharge cavity 1 requires remote control to ensure the security of the operation. The RF power source and impedance matching network is used in conjunction with a cable connection.
[0023] A certain gap is retained between the coupling coil 4 and the discharge chamber 1, and the rail 8 is arranged in parallel with the discharge chamber 1 axis, and the coupling coil 4 does not force the discharge chamber 1 to move to ensure its septality.
[0024] The coil bracket 6 and the insulating member 5 use a rigid material to ensure the effectiveness and real time of the stepper motor drive.
[0025] The movement on the slide rail 8 includes, but is not limited to, mounting a stepping motor on a coil holder 6, and mounting the rail 8 on the coil bracket 6. Or secure the stepping motor to other objects, replace the rail 8 with the stepping motor into a combination of the screw and the motor, and the coil holder 6 moves on the screw.
[0026] The coupling coil 4 is moved against the discharge chamber 1 axial direction, including, but not limited to, using a flexible cable connection using the coupling coil 4 and the impedance matching network, or other deformable mechanical structures to ensure the coupling coil motion Normal transmission of RF power.
[0027] The remote control includes a signal of a stepping motor to transmit to a stepper motor through an optical fiber to prevent interference of RF electromagnetic fields.
[0028] figure 1 In the discharge chamber 1, the main area of ​​radio frequency plasma discharge is mainly concentrated in the geometric center of the discharge cavity and the coupling coil. Upper transition flange 2, under the transition flange 3, is the export of particles. The coupling coil 4 is not fixed between the discharge cavity 11. The insulating member 5 acts as a rigid connection coupling coil 4 and the coil holder 6, preventing the RF power on the coupling coil 4 affects the step motor and the control system. The coil bracket 6 serves as a fixed coil position and the housing of the stepping motor and the gear set 7. Stepping motor and gear set 7, providing power to adjustment of the position of the coupling coil. The slide rail 8 is typically fixed on the bracket of the experimental device, and the gear can adjust the coil 4 position on the rail 8. Flexible cable 9, connection impedance matching network and coupling coils, to ensure the active space of the coupling coil 4 under the premise of radio frequency power transmission is not affected.
[0029] The principle and method of use of the device are: in the process of inductive coupling radio frequency plasma discharge and lead, the plasma density near the lower transition flange 3 has a decisive effect on the density of the leading particles, and the plasma density near the transition flange 3 The distance between the transition flange 3 is negatively correlated with the distance of the coupling coil 4. When adjusting the extraction of the particle density, the rotation of the stepper motor is controlled by the remote control system, and the stepping motor drives the gear set on the slide rail 8 to drive The coupling coil 4 moves in the direction of the arrow (the axial direction of the discharge cavity 1), and adjusts the lead particle density.
[0030]The embodiments described above are merely described in the preferred embodiments of the present invention, and preferred embodiments have not detailed all of the details, nailing to limit the invention.In the premise of not departing from the spirit of the invention, various modifications and modifications of the technical solutions of the present invention have been set within the scope of protection determined by the claims of the invention.
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

no PUM

Description & Claims & Application Information

We can also present the details of the Description, Claims and Application information to help users get a comprehensive understanding of the technical details of the patent, such as background art, summary of invention, brief description of drawings, description of embodiments, and other original content. On the other hand, users can also determine the specific scope of protection of the technology through the list of claims; as well as understand the changes in the life cycle of the technology with the presentation of the patent timeline. Login to view more.
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Similar technology patents

Vehicle-mounted battery installation platform

InactiveCN104723304AAvoid shockRealize the adjustment of spatial postureWork benchesButt jointLinkage concept
Owner:王昕

Classification and recommendation of technical efficacy words

Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products