Device for adjusting density of lead-out particles by adjusting position of coupling coil

A technology of coupled coils and particle density, applied in the direction of plasma, electrical components, etc., can solve the problems of inconvenient adjustment, and achieve the effect of avoiding impact, reducing complexity, and reducing the requirements for adjustment response

Pending Publication Date: 2021-09-17
HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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Problems solved by technology

[0009] The purpose of the present invention is to provide a device for adjusting the position of the coupling coil to adjust the density of the extracted particles, which is used to solve the problem of inconvenient adjustment of the density of the extracted particles on the current equipment, and can adjust the position of the central area of ​​the inductively coupled radio frequency plasma discharge relative to the extracted electrode , so as to achieve the adjustment of the density of the extracted

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  • Device for adjusting density of lead-out particles by adjusting position of coupling coil

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[0021] The present invention will be described in detail below with reference to the accompanying drawings and specific examples. However, the following examples are limited to the appended claims, and the scope of the invention should include all the contents of the claims, and those skilled in the art can completely implement the entire contents of the present invention by those skilled in the art.

[0022] figure 1 An adjustable coupled radio frequency ion source is an adjustable coupled radio frequency ion source. like figure 1 As shown, the coil position adjustable inductive coupling frequency ion source includes a discharge chamber 1, an upper transition flange 2, a lower transition flange 3, a coupling coil 4, an insulating member 5, a coil bracket 6, a stepping motor, and a gear set 7, Slide rail 8, flexible cable 9, RF power source, and impedance matching network, etc. Plasma is mainly produced in the discharge chamber 1. The upper end of the discharge cavity 1 is provid...

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Abstract

The invention discloses a device for adjusting the density of lead-out particles by adjusting the position of a coupling coil. The device comprises a discharge cavity, an upper transition flange, a lower transition flange, the coupling coil, an insulating part, a coil support, a stepping motor, a gear set, a sliding rail, a flexible cable, a radio frequency power source and an impedance matching network. The relative positions of the coupling coil and the discharging cavity are not fixed, the coupling coil is connected with the coil support through the insulating part, the coil support accommodates the installation positions of the stepping motor and the gear set at the same time, and the axial movement of the coupling coil in the discharging cavity is adjusted by controlling the movement of the stepping motor on the sliding rail. And the density of the plasma near the lower transition flange is adjusted to realize the density adjustment of the lead-out particles. The coupling coil is connected with the impedance matching network through a flexible cable. The requirement for radio frequency power source adjustment response is lowered, the adjustment range needed by the impedance matching network is reduced, the stability of radio frequency plasma discharge is enhanced, and the complexity of system operation is lowered.

Description

technical field [0001] The invention relates to a device for adjusting the position of a coupling coil to adjust the density of extracted particles, and belongs to the technical field of plasma extraction. Background technique [0002] Inductively coupled RF ion sources are widely used in the fields of material science, medical equipment, and magnetic confinement fusion. In a neutral beam injection (NBI) system, radio frequency power is passed through a coupled coil to generate an electromagnetic field that accelerates electrons to collide with other particles, ionizing the gas to form a plasma. Charged particles in the plasma, such as negatively charged electrons and negative ions, and positively charged positive ions can be accelerated and extracted through the extraction electrode, and the extracted particles are accelerated by the acceleration electrode to form a particle beam, which can be used for magnetic confinement nuclear fusion devices. Plasma heating and electri...

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Application Information

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IPC IPC(8): H05H1/46
CPCH05H1/46Y02E30/10
Inventor 梁立振刘伟时超李超王昊明屈浩刘洋
Owner HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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