Methods and apparatus for stabilizing vanadium compounds

Abstract

Methods of stabilizing a vanadium compound in a solution, compositions including a vanadium compound and a stabilizing agent, apparatus including the composition, systems that use the composition, and methods of using the compositions, apparatus, and systems are disclosed. Use of the stabilizing agent allows for use of desired precursors, while mitigating unwanted decomposition of the precursors.

Description

technical field

[0001] The present disclosure generally relates to methods and apparatus suitable for gas phase reactor systems. More particularly, the present disclosure relates to methods, compounds and devices that can be used to stabilize precursors in gas phase reactor systems. Background technique

[0002] A precursor is a chemical compound that can be used to form another material. For example, precursors may be used in gas phase reactions to form thin films or layers of materials. Unfortunately, some precursors that may have desirable properties (such as a desired vapor pressure at atmospheric pressure and temperature, and / or a desired reactivity (e.g., with a surface or another compound)) may Thermally decomposed into other compounds. In particular, some precursors may decompose to produce corrosive gases that may corrode parts of the reactor system and / or cause undesired etching during processing. Decomposition may shorten the shelf life of the precursor, compl...

Examples

Embodiment Construction

[0020] The descriptions of exemplary embodiments of methods, compositions, containers, devices, systems, and uses thereof provided below are exemplary and for purposes of illustration only; the following descriptions are not intended to limit the scope of the disclosure or the claims . Furthermore, the recitation of multiple embodiments having recited features is not intended to exclude other embodiments having additional features or other embodiments incorporating different combinations of recited features. For example, various embodiments are set forth as exemplary embodiments and may be recited in the dependent claims. Unless otherwise stated, the exemplary embodiments or components thereof may be combined or may be applied independently of each other.

[0021] As set forth in more detail below, various embodiments of the present disclosure provide methods, systems, compositions, and devices to perform or facilitate delivery, storage, and / or supply of compositions and / or v...

technical field

[0001] The present disclosure generally relates to methods and apparatus suitable for gas phase reactor systems. More particularly, the present disclosure relates to methods, compounds and devices that can be used to stabilize precursors in gas phase reactor systems. Background technique

[0002] A precursor is a chemical compound that can be used to form another material. For example, precursors may be used in gas phase reactions to form thin films or layers of materials. Unfortunately, some precursors that may have desirable properties (such as a desired vapor pressure at atmospheric pressure and temperature, and / or a desired reactivity (e.g., with a surface or another compound)) may Thermally decomposed into other compounds. In particular, some precursors may decompose to produce corrosive gases that may corrode parts of the reactor system and / or cause undesired etching during processing. Decomposition may shorten the shelf life of the precursor, compl...

Examples

Embodiment Construction

[0020] The descriptions of exemplary embodiments of methods, compositions, containers, devices, systems, and uses thereof provided below are exemplary and for purposes of illustration only; the following descriptions are not intended to limit the scope of the disclosure or the claims . Furthermore, the recitation of multiple embodiments having recited features is not intended to exclude other embodiments having additional features or other embodiments incorporating different combinations of recited features. For example, various embodiments are set forth as exemplary embodiments and may be recited in the dependent claims. Unless otherwise stated, the exemplary embodiments or components thereof may be combined or may be applied independently of each other.

[0021] As set forth in more detail below, various embodiments of the present disclosure provide methods, systems, compositions, and devices to perform or facilitate delivery, storage, and / or supply of compositions and / or v...

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