Movable magnetic steel type self-driven magnetic levitation guide rail device and control method thereof

Abstract

The invention discloses a movable magnetic steel type self-driven magnetic levitation guide rail device and a control method thereof, and belongs to the technical field of high-end equipment. Four guide sleeve supporting frames are combined to form a square sleeve, I-shaped electromagnets are packaged in the middles of the four guide sleeve supporting frames respectively, and permanent magnets are packaged in the guide sleeve supporting frames located on the upper portion. The guide shaft supporting frame is a cuboid frame, and a plurality of E-shaped assemblies are packaged on the four side faces of the guide shaft supporting frame in the length direction. The E-shaped assemblies packaged on the upper side face and the lower side face of the guide shaft supporting frame are symmetrically arranged, the E-shaped assemblies packaged on the left side face and the right side face of the guide shaft supporting frame are symmetrically arranged, and the E-shaped assemblies packaged on the four side faces of the guide shaft supporting frame and the I-shaped electromagnets packaged in the middles of the four guide sleeve supporting frames are oppositely arranged. A coil winding is packaged on the upper side of the guide shaft supporting frame and located on one side of the E-shaped assembly, and the coil winding and the permanent magnet are oppositely arranged. The invention is used in an ultra-precision system.

Description

technical field [0001] The invention belongs to the technical field of high-end equipment, and in particular relates to a moving magnet steel type self-driving maglev guide rail device and a control method thereof. Background technique [0002] With the development of scientific research and industry, there is an increasing demand for high-precision semiconductor wafers, precision optical components, precision molds, micro-parts and micro-structures. The precision level required by these products is also getting higher and higher, which greatly stimulates the development of ultra-precision machining technology, especially the ultra-precision motion platform. In order to achieve high-performance, high-integration, high-efficiency, and low-cost production, IC equipment manufacturers in the world have increased investment in research and development to develop a new generation of high-speed, high-precision ultra-precision positioning motion platform. As the core component of t...

AI Technical Summary

Problems solved by technology

[0008] The purpose of the present invention is to provide a moving magnetic steel type self-driving maglev guide rail device and its control method, in order to solve the problem that the existing high-performance guide rail cannot be self-driven, cannot actively adjust the gap with multiple degrees of freedom, and it is difficult to guarantee high rigidity and straightness , the moving magnet steel type self-driven maglev guide rail device of the present invention has no cables for the guide sleeve (mover), no cable dragging, and no additional cable auxiliary mechanism, which can achieve higher gap adjustment accuracy and improve the maglev The rigidity and robustness of the guide rail can meet the needs of the ultra-precision motion platform for the guide rail (guide shaft plus guide sleeve) in terms of structure, workplace and motion performance.

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