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Self-compensating micro-mirror surface driving device and compensation method for working voltage of self-compensating micro-mirror surface driving device

A technology of working voltage and driving devices, which is applied in the direction of instruments, optical components, optics, etc., can solve the problems that the torsion accuracy of the micromirror surface affects the control accuracy of optical signals, etc., and achieve the effect of improving device performance and precise control

Pending Publication Date: 2021-10-29
SEMICON MFG ELECTRONICS (SHAOXING) CORP
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AI Technical Summary

Problems solved by technology

[0003] An existing micromirror driving device is based on the twisting of the micromirror to control the optical signal, so the twisting accuracy of the micromirror will directly affect the control accuracy of the optical signal

Method used

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  • Self-compensating micro-mirror surface driving device and compensation method for working voltage of self-compensating micro-mirror surface driving device
  • Self-compensating micro-mirror surface driving device and compensation method for working voltage of self-compensating micro-mirror surface driving device
  • Self-compensating micro-mirror surface driving device and compensation method for working voltage of self-compensating micro-mirror surface driving device

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Embodiment Construction

[0036] The micromirror drive device generally applies a working voltage to make the drive component drive the micromirror to twist a predetermined angle during its working process. Therefore, the control of the micromirror's twist angle by the micromirror drive device in the working process directly reflects the device. performance.

[0037] The inventors of the present invention have found that an important factor affecting the torsion accuracy of the micromirror is that there is still a slight twist of the micromirror under the condition of no operating voltage, which will cause deviations in the twisting angle of the micromirror under a predetermined operating voltage .

[0038] For this reason, the present invention provides a kind of compensation method of the operating voltage of micromirror surface driving device, comprising: detecting the deflection direction and deflection angle of micromirror surface under no operating voltage, according to the deflection direction a...

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Abstract

The invention provides a self-compensating micro-mirror surface driving device and a compensation method of a working voltage of the self-compensating micro-mirror surface driving device. According to the self-compensating micro-mirror surface driving device, a deflection direction and a deflection angle of a micro-mirror surface under the condition of no working voltage are obtained, and the working voltage of the micro-mirror surface is compensated according to a deflection state of the micro-mirror surface under the condition of no working voltage in the working process of the device, so that the error generated by micro torsion of the micro-mirror surface under the condition of no working voltage is corrected, namely, the micro-mirror surface driving device in the invention can realize a self-compensation function, so that the accurate control on the torsion angle of the micro-mirror surface is improved, and the performance of the device is effectively improved.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a self-compensating micromirror drive device and a compensation method for its operating voltage. Background technique [0002] Micromirror driving devices (for example, MEMS micromirror driving devices) can be widely used in optical fiber communication, and the dynamic control of optical signals can be realized by moving the micromirrors in the micromirror driving devices. Among them, the micro-mirror drive device can be applied to optoelectronic devices such as optical switches, optical attenuators, and wavelength selective switches. At the same time, the micro-mirror drive device also has great applications in the fields of optical scanning, optical display, and laser deflection. prospect. [0003] An existing micromirror driving device controls optical signals based on the twisting of the micromirror, so the twisting accuracy of the micromirror will directly affect th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/08
CPCG02B26/0833
Inventor 张兆林
Owner SEMICON MFG ELECTRONICS (SHAOXING) CORP
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