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Mask clamping module, mask stretching device and net stretching machine

A mask and clamping technology, which is applied in the field of mask stretching device, tensioning machine, and mask clamping module, can solve the problems of clamping accuracy influence and so on

Active Publication Date: 2021-11-02
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The object of the present invention is to provide a mask clamping module, a mask stretching device and a netting machine to solve the problem that the clamping accuracy is easily affected in the prior art

Method used

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  • Mask clamping module, mask stretching device and net stretching machine
  • Mask clamping module, mask stretching device and net stretching machine
  • Mask clamping module, mask stretching device and net stretching machine

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Embodiment Construction

[0033] In order to make the purpose, advantages and features of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the drawings are all in very simplified form and not drawn to scale, and are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention. In addition, the structures shown in the drawings are often a part of the actual structures. In particular, each drawing needs to display different emphases, and sometimes uses different scales.

[0034] As used in this specification, the singular forms "a", "an" and "the" include plural referents unless the content clearly dictates otherwise. As used in this specification, the term "or" is generally employed in its sense including "and / or" unless the content clearly dictates otherwise.

[0035] The invention provides a mask clamping modu...

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Abstract

The invention provides a mask clamping module, a mask stretching device and a net stretching machine. The mask clamping module comprises a driving assembly, a first movable block, a second movable block and a clamping assembly, wherein the first moving block is driven by the driving assembly to move horizontally in the first direction; the first movable block comprises a first contact surface, the second movable block comprises a second contact surface arranged opposite to the first contact surface, the first movable block and the second movable block are connected through the first contact surface and the second contact surface, and the first contact surface and the second contact surface are limited at the moving freedom degree in the direction perpendicular to the first contact surface and the second contact surface; the second moving block is driven by the translational motion of the first moving block to do a translational motion along a second direction; and the clamping assembly is connected with the second movable block, moves along with the second movable block and is used for clamping the mask. According to the configuration, the transmission mechanism is simple in structure, stable and reliable in transmission and high in movement precision, clamping force transmission errors are reduced, and the clamping quality of the mask is improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor and display manufacturing equipment, in particular to a mask clamping module, a mask stretching device and a net stretching machine. Background technique [0002] During the production of OLED (Organic Light-Emitting Diode) displays, the organic light-emitting materials are mainly evaporated onto the display backplane by evaporation according to a predetermined procedure. Generally, the graphics on the mask are used to evaporate materials of various colors onto the corresponding position. In the process of making the mask, it is necessary to apply tension at both ends of the mask to stretch the mask and then weld it on the metal frame for evaporation. [0003] The deformation error generated when the mask is fixed by its carrier directly affects the quality of the flat panel display device. During the clamping process of the existing mechanical clamping and fixing devices, due to the compl...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/12C23C14/24H01L51/56
CPCC23C14/042C23C14/12C23C14/24H10K71/166H10K71/00
Inventor 黄正隆张洪博张瑞平孙启峰
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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