Sensitivity enhancing device for hot-wire type acoustic mass point vibration velocity sensor

Abstract

The invention belongs to the technical field of sensors, and particularly relates to a sensitivity enhancing device for a hot-wire type acoustic mass point vibration velocity sensor, which comprises an MEMS chip (1), a PCB (printed circuit board) (2) and an acoustic resonant cavity (3), a first rectangular hole is formed in the middle of the acoustic resonant cavity (3), and the interior of the acoustic resonant cavity is of a hollow structure; the PCB (2) is arranged on the acoustic resonant cavity (3); the MEMS chip (1) is arranged on the PCB (2), a third rectangular hole is etched in the middle of the MEMS chip (1), two selectively corroded hot wires (4) are arranged in the middle of the MEMS chip (1), and the two suspended hot wires (4) are correspondingly connected with a front metal electrode (5) arranged at the top of the MEMS chip (1) and a back metal electrode arranged at the bottom of the MEMS chip (1) respectively. Meanwhile, leads are respectively arranged on the front metal electrode (5) and the back metal electrode, and the MEMS chip (1) is connected with the PCB (2) through the leads.

Description

technical field [0001] The invention belongs to the technical field of sensors, and in particular relates to a sensitivity enhancing device for a hot-wire acoustic particle vibration velocity sensor. Background technique [0002] The hot-wire acoustic particle velocity sensor is a new type of acoustic sensor, which can directly measure the acoustic particle velocity. As the only sensor that can measure the acoustic particle velocity at present, it has a wide range of application prospects, can supplement acoustic research and Discover some new acoustic phenomena and applications. [0003] The hot-wire acoustic particle velocity sensor uses the disturbance of the thermal field by the sound wave for sensing. The sensor usually includes two long and thin platinum wires with a distance of about 100 microns. The two platinum wires are parallel to each other, suspended in the air and have a sub-micron cross-sectional size, and the length is generally 1000 microns. After heating ...

AI Technical Summary

Problems solved by technology

[0005] The advantage of the existing hot-wire acoustic particle velocity sensor compared with the traditional sound pressure sensor is that it can measure the magnitude of the acoustic signal and obtain the direction of the acoustic particle velocity at the same time, which belongs to the vector sensor; however, the existing hot-wire acoustic particle velocity sensor has The technical problem of low sensitivity, the structure of the device used to enhance the sensitivity is complex, and the production is complicated, and the precision of the production is high

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