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Pendulum valve

A technology of pendulum valves and valves, applied in the direction of valve devices, valve details, sliding valves, etc., to achieve the effect of maintaining sealing characteristics and inhibiting the discharge of particles and hardened substances

Pending Publication Date: 2021-11-16
FUGEN CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

That is, the lubricant is hardened by the heat generated by rotation, contact with corrosive gas, and surrounding heat to form particles, which not only stick to the wafer but also affect the rotation. Therefore, when solving such problems by applying lubricant limit

Method used

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Examples

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Embodiment Construction

[0048] Advantages and characteristics of the present invention, and methods for realizing them will become clear with reference to the accompanying drawings and embodiments described in detail later. However, the present invention is not limited to the examples disclosed below, and can be realized in various forms different from each other.

[0049] In this specification, the embodiments make the disclosure of the present invention complete, and are provided in order to fully inform the scope of the present invention to those having ordinary knowledge in the technical field to which the present invention pertains. And the present invention is defined only by the scope of the claims. Therefore, in several embodiments, well-known components, operations and techniques are not described in detail in order to avoid obscuring the present invention.

[0050] In addition, the same reference numeral refers to the same constituent element throughout the specification. Also, the terms ...

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Abstract

The present invention relates to a pendulum valve which is installed in a connection pipe connecting a vacuum pump between the vacuum pump and a chamber of a dry type etching device in an etching line of a semiconductor process to control an amount of gas, and in particular, the invention relates to a pendulum valve, comprising a fixing housing which allows a shaft coupled to a valve gate controlling the amount of gas to be closely attached and fixated to a valve housing through a sealing ring; and a rotational shaft (inner shaft) coupled to the inside of the fixing housing. By providing the pendulum valve, the rotational shaft separated from the valve housing rotates by using a lip seal as a shaft to maintain sealing properties of the pendulum valve and restrain discharge of a curing substance and unnecessary particles.

Description

technical field [0001] The present invention relates to a pendulum valve (PENDULUM VALVE). In the etching line of the semiconductor process, it is arranged in the connecting pipe and adjusts the gas volume. The connecting pipe is connected to the vacuum pump between the chamber of the dry etching device and the vacuum pump, and more In detail, it relates to a pendulum valve, which includes: a fixed housing, which makes the shaft combined with the valve (valve gate) for adjusting the amount of gas closely fixed to the valve housing through a sealing ring; the rotating shaft (internal shaft), which is combined with the By providing the pendulum valve on the inner side of the fixed case, only the rotating shaft separated from the valve case rotates about the lip seal, and the discharge of unnecessary particles and hardened substances can be suppressed while maintaining the sealing characteristics of the pendulum valve. Background technique [0002] Generally, in a semiconductor...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16K3/10F16K3/30F16K27/04F16K41/02
CPCF16K3/0227F16K3/10F16K3/30F16K41/026F16K27/045H01L21/67069F16K51/02F16K31/041F16K31/535F16K3/314F16K3/04F16K3/34F16K31/04F16K27/04F16H57/02H01L21/67017F16K3/0254F16K31/047
Inventor 安熙俊金凑泽
Owner FUGEN CO LTD
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