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Gas film composite tungsten-rhenium alloy film thermocouple based on surface microcolumn array

A micro-pillar array, tungsten-rhenium alloy technology, applied in thermometers with directly sensitive electrical/magnetic components, measuring heat, using electrical devices, etc. , increase the response time and other issues, to achieve the effect of working for a long time, reducing adhesion, and maintaining the temperature measurement response

Active Publication Date: 2021-12-03
XI AN JIAOTONG UNIV
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

However, when it is used to detect the temperature of molten steel at high temperature, since the molten steel is easy to adhere to the surface of the film, and even solidifies to form steel, the surface thickness of the film will rise sharply during use, and the thermal resistance will increase significantly, making it difficult to use.
[0004] There are also thin-film thermocouple temperature sensors, which are difficult to directly measure the temperature of water for a long time without packaging
If the package shell is added, the response time will be greatly increased, resulting in slow response of the sensor

Method used

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  • Gas film composite tungsten-rhenium alloy film thermocouple based on surface microcolumn array
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  • Gas film composite tungsten-rhenium alloy film thermocouple based on surface microcolumn array

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Embodiment Construction

[0031] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0032] In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", " The orientation or positional relationship indicated by "vertical", "horizontal", "top", "bottom", "inner", "outer", "side", "end", "side" etc. is based on the Orientation or positional relationship is only for the convenience of describing the present invention and simplif...

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Abstract

The invention discloses a gas film composite tungsten-rhenium alloy film thermocouple based on a surface micro-column array. The tungsten-rhenium alloy film thermocouple is arranged on the surface of a planar alumina ceramic substrate, and the tails of the tungsten-rhenium alloy film thermocouple are respectively connected with the corresponding metal leads; a plurality of micron micro-columns are arranged on the surface of the tungsten-rhenium alloy film thermocouple in an array manner to form an aluminum oxide micro-column array, the middles of the micron micro-columns are filled with air to form air film holes, and the planar aluminum oxide ceramic substrate, the tungsten-rhenium alloy film thermocouple and the aluminum oxide micro-column array form a three-layer laminated structure. The gas film composite tungsten-rhenium alloy film thermocouple is reasonable in scheme and simple in structure, is easy to implement and is capable of giving full play to the advantage of directional flowing of the microstructure air film holes.

Description

technical field [0001] The invention belongs to the technical field, and in particular relates to a gas-film composite tungsten-rhenium alloy thin-film thermocouple based on a surface microcolumn array. Background technique [0002] The early thermocouple was invented in 1821. After that, the thermocouple temperature sensor has achieved great success in the fields of steam temperature measurement, thermal response to explosion products, heating, and measuring the surface temperature of high-temperature objects. The new thermocouple structure based on MEMS technology has been widely mentioned in recent years. It has the advantages of simple structure, convenient manufacture, wide measurement range, high precision, small inertia and easy remote transmission of output signals. [0003] At present, thin-film thermocouples are prepared by using tungsten-rhenium alloy and alumina ceramics, which not only meet the temperature measurement at high temperature for a long time, but als...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01K7/02
CPCG01K7/028G01K1/08G01K7/021
Inventor 张仲恺田边张丙飞刘江江刘兆钧赵立波
Owner XI AN JIAOTONG UNIV
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