Full-automatic high-speed silicon wafer inserting machine

[0033] Example one

[0034] Such as Figure 1 to 8 As shown, the fully automatic high-speed wafer set of the present invention includes a base 1, a conveyor belt 2, a support wall 3, a hydraulic rod 4, a connecting plate 5, a screw 6, a screw 7, and a fan blade 8; The central portion of the top surface of the base 1 is provided, and the top surface of the base 1 is fixed to the support wall 3, and the bottom end of the support wall 3 opens a channel 41, and both sides of the pass groove 41 are open. The slot, the internal fixation of the hydraulic rod 4 of the slot, the piston rod of the hydraulic rod 4, the top of the connecting plate 5 adjacent to the rod of the hydraulic rod 4, and the communication The middle portion of the sidewall of the groove 41 rotates the mounting screw jacket 7, and the inner ring of the screw 7 is fitted with the outer ring of the screw 6, and the outer ring of the screw 7 is provided with a plurality of fan blade 8; when working, production When the silicon wafer is stored, the surface of the partial silicon wafer will appear dust. If it is not cleaned in time, the dust can be adsorbed on the surface of the silicon wafer, affecting the subsequent use of the silicon wafer; The film, the silicon wafer is transmitted by the conveyor belt 2, when the silicon wafer passes through the slot 41, the hydraulic rod 4 pushes the connecting plate 5 slides, drive the screw 6 slide, the drive and the screw 7 rotation of the thread, drive the fan blade 8 rotate Producing wind power, blowing through the silicon wafer, blow away from the surface of the surface of the silicon sheet; effectively removes the dust from the silicon production to the storage to the storage, avoiding the surface of the silicon surface affects subsequent use And processing.

[0035] Both sides of the connecting plate 5 are provided, and the bottom surface of the first slide rail is fixed to the top surface of the base 1, and the top of the rail 9 slides the slider 10, the slip The side surface of the block 10 is fixed to the side surface of the connecting plate 5, and the top surface of the slider 10 is rotated to mounting the plurality of roller 11, and the outer ring of the roller 11 is secured to a silica gel soft cover; when working, the hydraulic rod 4 is pushed The connecting plate 5 slides, and the sliding slider 10 slides along the first sliding rail 9, driving the rollers 11 on both sides close to the transfer belt 2, pushing the wafers of the conveyor belt 2 to the center position of the conveyor belt 2, avoiding the position of the silicon wafer. Move the wafer damage; by the set silica gel soft sleeve, the impact force of the roller 11 on the silicon wafer is reduced, and the wafer is damaged.

[0036] The central portion of the sidewall of the pass groove 41 opens the groove 12, and the inner rotation mounting bearing 13 is rotatably mounted, and the inner ring of the bearing 13 is rotatable with the outer ring of the screw jacket 7, the end of the tail set 7 The mounting hole 14 is opened in the middle, and the inside of the mounting hole 14 is rotatably mounting the housing 15, the housing 15 is adjacent to one end oil groove 16 of the screw 6, and the cross section of the oil tank 16 is a housing, and the passage The middle portion of the oil tank 16 is rotated mounting the rubber sheet 17, the top contact of the rubber sheet 17 is adjacent to the side of the screw 6, the bottom contact of the rubber sheet 17, away from the hole 16 separator, away from the screw 6, said The central fixation of the oil tank 16, the partition plate is fixed to the middle portion of the rubber sheet 17, and the top portion of the housing 15 is opened, and one end of the oil hole 18 communicates with the top of the separator. The oil hole 19 is opened at the bottom of the housing 15, and one end of the oil hole 19 communicates with the bottom of the separator, and the other end of the oil hole 18 is fixed into the tubing 20, the oil pipe 20 runs through The sidewall of the pass groove 41, the other end of the oil hole 19 fixed the oil pipe 21, the oil pipe 21 penetrates through the sidewall of the channel 41, the side surface of the support wall 3, respectively, the lubricating oil tank 22, the The oil pipe 20 is connected to the top of the lubricant tank 22, and the oil pipe 21 is coupled to the bottom of the lubricating oil tank 22; when operating, the screw 6 is driven by the screw 6, when the screw 6 is close to the transfer belt 2, the screw 6 is inserted from the screw 6 The negative pressure was removed, so that the negative pressure was generated in the screw 7, and the top portion of the driving rubber sheet 17 was rotated away from the surface of the separator. The inlet hole 18 was opened, and the oil tube 20 was pumped into the hoisting oil in the lubricating oil tank 22. Inside, the surface of the bottom extruded partition plate of the rubber sheet 17 is driven, the oil hole 19 is closed, the lubricating oil is lubricated with the thread of the screw 6 and the screw 6, and improves the smoothness of the rotation of the spiro 7; when the screw 6 When the conveyor belt 2 is moved away, the screw 6 enters the inside of the screw 7 such that the pressure in the screw 7 increases, so that the top of the rubber sheet 17 rotates the surface of the partition plate, and the oil hole 18 is turned off while driving the rubber sheet 17. The bottom is detached from the surface of the partition plate, and the oil hole 19 is opened so that the excess lubricants in the screw 7 are discharged into the lubricant tank 22; so that the lubricating oil in the screw 7 is always held in a flow state, avoiding lubricating oil. The increase in impurities increases and affects the smoothness of the rotation of the screw 7, and then further increases the wind generated by the blade 8 rotation.

[0037] The inner wall of the lubricant tank 22 secures the metal mesh plate 23, which is located between the oil supply pipe 20 and the oil pipe 21; the discharged lubricant is physically filtered by the metal mesh 23, and the lubricating oil Solid impurities are filtered, and the degree of cleaning of the lubricating oil enters the screw 7 is improved, thereby further improving the fluency of the spiral 7 rotation.

[0038] The outer ring of the screw 7 is threaded with hexagonal 24, and the side screw mounting fan blade 8 of the hexagonal seat 24 is mounted, and the protective ring plate 25 is secured to the sidewall 25, the protective ring plate 25 The inner ring is sleeved in the outer ring of the sector blade 8; through the threaded hexagonal 24, it is easy to adjust the distance between the sector blade 8 and the conveyor belt 2; isolate the fan blade 8 by the protective ring plate 25, to avoid the blade 8 Broken splash caused by fragments.

[0039] The thread bottom of the inner ring of the screw 7 opens a plurality of ball grooves 26, and the inner sliding mounting rubber seal ball 27 internally, the outer wall of the rubber seal 27, and the outer wall of the screw 6 slides together; By the set rubber seal 27, the inside of the screw jacket 7 is effectively sealed without affecting the screw 6 and the screw jacket 7, the lubricating oil in the screw 7 inside is avoided.

[0040] The lower portion of the base 1 is fixed to the electrocompression cylinder 28, and the tip fixture plate 29 of the electrical push cylinder 28, the four-angle, fixed-position 30, four-angle, limit column Slide between 30, the inside of the storage cassette 31 opens a plurality of slots, and both sides of the electrical push cylinder 28 are provided, and the second rail 32 is fixed to the base 1. The second rail 32 is slidably fitted with the pallet 29; pushes the pallet 29 through the electrical push cylinder 28 along the second rail 32, and the storage box 31 is moved upward, and the conveyor belt 2 is fitted, and the silicon-completed wafer is inserted into the plug. In the slot, the storage work of the silicon wafer is achieved.

[0041] The top surfaces of the pallet 29 are all secured to the screw 33, and the other side of the stud 34 is slidable between the stud 34, and the bottom surface of the pressure plate 34 is in contact with the top surface of the storage case 31, the stud 33 The top outer ring mounting the nut, the bottom end of the nut is in contact with the top surface of the pressure plate 34; bonded by the stud 33, so that the pressure plate 34 is pressed against the storage cassette 31 to avoid shake and displacement of the storage box 31 causes silicon. Crash damage occurred.

[0042] Example 2

[0043] Such as Figure 9 to 12 As shown, both sides of the housing 35 are opened on both sides of the inlet of the storage cassette 31, and the sliding plate 36 is slidably mounting between the chute 35, and the bottom mounting spring 37 of the chute 35, the baffle 36 The top is fixed to block 38, and the insertion of the chassis 39 is fixed in the lower portion of the base 1, and the moving block 38 is in contact with the setup block 39, the top surface of the baffle 36 and the storage box 31. The top of the inlet is inlaid, and the magnet 40 is attracted to each other; when the storage cassette 31 is raised, the moving insert 38 is blocked by the setup block 39 such that the baffle 36 is blocked, the spring 37 compresses the energy, will The storage port of the storage case 31 opens, so that the wafload which is completed, the wafer is completed into the slot, and when the storage box 31 is accommodated, the storage cassette 31 is removed, and the spring 37 is reset, the baffle 36 is joined, so that the magnet 40 The storage cassette 31 is sealed to achieve a sealed storage of the silicon wafer.

[0044] Working principle: First, place the storage cassette 31 to the top surface of the pallet 29, the housing port of the storage case 31 is aligned, so that the limit column 30 caught the four corners of the storage case 31, and then place the pressure plate 34 to the stud. The outer ring of 33, so that the pressure plate 34 contacts the top surface of the storage case 31, using the nut to be screwed to the outer ring of the stud 33, and press the pressure plate 34 to press the pressure plate 31, so that the storage box 31 is fixed;

[0045] Thereafter, the silicon wafer produced from the wafer slicer to the top surface of the conveyor belt 2, when the silicon wafer produced, some silicon wafers appear dust, if it is not cleaned up, then dust adsorbed in a silicon The surface, affecting the silicon wafer, the silicon wafer is transmitted through the conveyor belt 2, when the silicon wafer passes through the channel 41, the hydraulic rod 4 pushes the connecting plate 5, and the hydraulic rod 4 pushes the connecting plate 5 slide, and the slider 10 is driven along the slider 10 The first sliding rail 9 slides, drives the rollers 11 on both sides to the transfer belt 2, and the wafer of the conveyor belt 2 is pushed to the center position of the conveying belt 2; at the same time, the connecting plate 5 drives the screw 6 slide, drives the threaded screw set of threads. Turn, drive the fan blade 8 rotate the wind, blow through the transported silicon wafers, blow away the dust from the surface of the silicon wafer, effectively remove the dust to the storage of the silicon production to the storage, avoid the surface of the silicon wafer Affect subsequent use and processing; The lubricating oil in the top of the lubricating tank 22 is inserted into the screw jacket 7, and the surface of the rubber sheet 17 is pressed the surface of the partition plate, and the oil hole 19 is closed, the lubricating oil is lubricated with the thread of the screw 6 and the screw 6. The fluency of the screw 7 is rotated; when the screw 6 is away from the conveyor belt 2, the screw 6 enters the inside of the screw jacket 7 such that the pressure in the screw 7 increases, so that the top of the rubber sheet 17 rotates the surface of the squeezing plate, will The oil hole 18 is closed, and the bottom of the rubber sheet 17 is driven away from the surface of the partition plate, and the oil hole 19 is opened, so that the excess lubricant in the screw 7 is discharged into the bottom of the lubricant tank 22; discharged into the bottom of the lubricant tank 22 The lubricating oil, as the lubricating oil is raised, the top lubricating oil passes through the metal sheet 23, so that the solid impurities in the lubricating oil are filtered through the bottom of the lubricating oil tank 22, so that the lubricating oil in the screw 7 is always maintained. The flow state avoids the fluency of impurities in the lubricating oil and affects the fluency of the screw 7 rotation;

[0046] Finally, the electrical push cylinder 28 pushes the pallet 29 slides along the second rail 32, and the storage box 31 is moved upward, with the conveyor belt 2, insert the silicon wafer completed by the chime into the slot, and achieve the storage work of the silicon wafer.

[0047] Beforeward, afterward, left, right, and next, in the drawings figure 1 For the baseline, according to the perspective of the human observation, the device faces the observer's side as before, the observer is defined as left and seconds.