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Method, device and equipment for accurately adjusting ADC camera and computer storage medium

A camera and precise technology, applied in chemical instruments and methods, self-melting liquid pulling method, single crystal growth, etc., to achieve the effect of improving quality

Active Publication Date: 2021-12-21
XIAN ESWIN MATERIAL TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In the conventional technical solution, the adjustment position of the ADC camera is generally obtained by measuring the actual scale when it is about to enter or has entered the equal-diameter stage. In this case, the adjustment of the ADC camera has a certain delay and needs to be adjusted repeatedly Only then can the ADC camera be adjusted to the set position to monitor the growth diameter of the single crystal silicon rod

Method used

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  • Method, device and equipment for accurately adjusting ADC camera and computer storage medium
  • Method, device and equipment for accurately adjusting ADC camera and computer storage medium
  • Method, device and equipment for accurately adjusting ADC camera and computer storage medium

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Embodiment Construction

[0028] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention.

[0029] see figure 1 , which shows a single crystal furnace 1 capable of realizing the technical solution of the embodiment of the present invention, the single crystal furnace 1 may include: a furnace body 10, a heating device and a pulling device are arranged in the furnace body 10; the heating device includes a graphite crucible 20 , a quartz crucible 30 and a heater 40, etc., wherein the quartz crucible 30 is used to contain silicon raw materials, such as polysilicon. The silicon raw material is heated and melted into the melt MS in the quartz crucible 30 , the graphite crucible 20 is wrapped on the outside of the quartz crucible 30 to provide support for the quartz crucible 30 during the heating process, and the heater 40 is arranged on the outside of the graphite crucible...

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Abstract

The embodiment of the invention discloses a method and device for accurately adjusting an ADC camera, equipment and a computer storage medium. The method comprises the following steps: before drawing a current single crystal silicon rod, respectively comparing changes of thermal field accessories corresponding to the current single crystal silicon rod and a previous furnace single crystal silicon rod to obtain a height change value from a diameter automatic control ADC camera to a melt solid-liquid interface; obtaining the horizontal displacement of the ADC camera according to the height change value based on the geometrical relationship between the height change value and the horizontal displacement of the ADC camera; and horizontally moving the ADC camera to a target position according to the horizontal displacement of the ADC camera.

Description

technical field [0001] Embodiments of the present invention relate to the field of semiconductor technology, and in particular, to a method, device, equipment and computer storage medium for precisely adjusting an ADC camera. Background technique [0002] Electronic grade monocrystalline silicon rods are a semiconductor material generally used in the manufacture of integrated circuits and other electronic components. At present, the common method of growing single crystal silicon rods is the Czochralski method, or called the Czochralski method, that is, in the single crystal furnace, the seed crystal is immersed in the molten silicon liquid contained in the crucible. In the process, the seed crystal is pulled while rotating the seed crystal and the crucible, so that seeding, shouldering, shoulder turning, equal diameter and finishing are sequentially performed at the end of the seed crystal to obtain single crystal silicon rods. At present, in order to obtain electronic-gra...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B15/26C30B29/06
CPCC30B15/26C30B29/06
Inventor 宋少杰宋振亮
Owner XIAN ESWIN MATERIAL TECH CO LTD
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