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Micromachined Quartz Tuning Fork Gyro

A quartz tuning fork and micro-mechanical technology, applied in gyro effect for speed measurement, gyroscope/steering sensing equipment, instruments, etc., can solve the problems of limiting the application of micro-mechanical gyroscopes and affecting the accuracy of gyroscopes

Active Publication Date: 2022-06-28
BEIJING CHENJING ELECTRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the existence of the gold electrode is equivalent to the load for driving the finger itself, which will affect the accuracy index of the gyroscope and limit the application of the micromechanical gyroscope.

Method used

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  • Micromachined Quartz Tuning Fork Gyro
  • Micromachined Quartz Tuning Fork Gyro
  • Micromachined Quartz Tuning Fork Gyro

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0069] refer to figure 1 and figure 2 The embodiment of the present invention provides a micromachined quartz tuning fork gyro, including an outer frame 1 , two thinning beams 2 , driving fingers 3 , detecting fingers 4 , coupling beams 5 , driving electrodes and detection electrodes 14 . One end of the thinning beam 2 is connected to the outer frame 1 , and the other end is connected to the coupling beam 5 . The coupling beam 5 extends in the vertical direction, the upper end is connected with the driving fork 3 , and the lower end is connected with the detection fork 4 .

[0070] The drive fingers 3 have a pair of opposing first opposing faces 15 and a pair of opposing second opposing faces 16 . The driving electrodes include a pair of first driving electrodes 10 and a pair of second driving electrodes 11 . A pair of first driving electrodes 10 respectively correspond to a pair of first opposing surfaces 15 , and a pair of second driving electrodes 11 respectively corres...

Embodiment 2

[0074] refer to Figure 3 to Figure 7 , the difference from the first embodiment is that the micromachined quartz tuning fork gyro also includes a first cover plate 6 and a second cover plate 7 that are fixedly connected to the outer frame 1, and the first cover plate 6 and the second cover plate 7 are respectively arranged on the outer frame. 1 on both sides. The first cover plate 6 and the second cover plate 7 respectively have fourth opposing surfaces 18 corresponding to the pair of first opposing surfaces 15 . The surfaces of the first cover plate 6 and the second cover plate 7 are provided with grooves 8 for arranging the first driving electrodes 10 , and first positioning marks 9 for aligning with the driving fingers 3 . The outer frame 1 is further provided with a second positioning mark 13 opposite to the first positioning mark 9 , and a through hole 12 for filling conductive glue, so as to conduct the electrodes on the first cover plate 6 and the second cover plate 7...

Embodiment 3

[0077] refer to Figure 8 to Figure 10 , the difference from the second embodiment is that a pair of first driving electrodes 10 are respectively arranged on a pair of fourth opposite surfaces 18 , that is, on the surfaces of the first cover plate 6 and the second cover plate 7 opposite to the driving fingers 3 Electrodes are prepared on the top, which are space electrodes on both sides of the front of the tuning fork. A pair of second driving electrodes 11 are respectively placed on a pair of third opposite surfaces 17, that is, electrodes are prepared on the surface of the outer frame 1 opposite to the driving fingers 3, which are space electrodes on both sides of the side of the tuning fork. There is no electrode on the drive finger 3.

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Abstract

The invention provides a micromechanical quartz tuning fork gyroscope, which includes an outer frame structure, an H-shaped tuning fork structure embedded in the outer frame structure, and driving electrodes circumferentially arranged around the driving fork fingers. The tuning fork structure includes a driving finger having a pair of opposing first opposing surfaces and a pair of opposing second opposing surfaces. The driving electrodes include a pair of first driving electrodes and a pair of second driving electrodes. Wherein, a pair of first driving electrodes respectively corresponds to a pair of first opposing surfaces, and a pair of second driving electrodes respectively corresponds to a pair of second opposing surfaces. At least one of the first driving electrode and the second driving electrode is disposed on a surface of the outer frame structure opposite to the driving fingers. With such arrangement, electrodes are prepared on the outer frame structure to reduce the electrode arrangement on the driving fingers, thereby reducing the load on the driving fingers, reducing the performance loss caused by the load, and improving the precision and reliability of the microgyroscope.

Description

technical field [0001] The invention relates to the technical field of micromechanical gyroscopes, in particular to a micromechanical quartz tuning fork gyroscope. Background technique [0002] Micromachined gyroscopes have been widely used in consumer electronics, aerospace and other technical fields due to their advantages of small size, light weight, low power consumption, mass production and low cost. With the continuous improvement of performance, the micro-machined gyroscope has become the core of the micro-inertial system and the key device to promote the development of the micro-miniaturization of the navigation system. [0003] At present, in the structure of the micromachined gyroscope, the quartz tuning fork gyroscope realizes the electrical connection of the gyroscope and the extraction of electrical signals by preparing gold electrodes on the surface of the driving fork fingers. However, the existence of gold electrodes is equivalent to a load for driving the f...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/5621
CPCG01C19/5621
Inventor 褚伟航裴志强张琳琳陶硕郄立伟赵黎明王天宇廖兴才
Owner BEIJING CHENJING ELECTRONICS