A kind of aluminum evaporation equipment for semiconductor thyristor processing

Abstract

The invention provides an aluminum evaporation equipment for semiconductor thyristor processing, which includes a mounting substrate, an aluminum evaporator body and an evaporation box. A push rod, the output end of the electric push rod is fixedly connected with an upper tungsten rod through a ceramic block, and a feeding pipe is communicated with the side of the evaporation box away from the aluminum evaporator body. The invention can carry out feeding without interruption, and can detect the internal processing conditions to ensure the safety of steaming aluminum, so as to solve the problem that part of the processing time of interrupting feeding after the existing tungsten rod melts the aluminum wire will waste the energy of the closed space and cause a lot of aluminum evaporation. The energy consumption of the machine needs to be replenished for the evaporation of the aluminum wire, the processing is not coherent, and the internal processing environment cannot be probed, which leads to the problem of serious consumption of the aluminum wire after the internal failure is still fed.

Description

technical field [0001] The invention relates to the technical field of semiconductor aluminum evaporation, in particular to an aluminum evaporation device for semiconductor thyristor processing. Background technique [0002] Thyristor can also be called silicon controlled rectifier. It is a high-power switching semiconductor device that can work under high voltage and high current conditions, and its working process can be controlled. It is widely used in controllable rectification, AC voltage regulation, contactless electronic switches, inverters and In electronic circuits such as frequency conversion. In the production process of the thyristor, an aluminum steaming process is required. The purpose is to steam a layer of aluminum on the cathode surface of the thyristor's die for electrode extraction. The process is as follows: the surface-treated aluminum wire is wound on the tungsten rod, and then the tube core is placed on the platform, and is buckled on the platform th...

AI Technical Summary

Problems solved by technology

[0004] In view of the deficiencies in the existing technology, the purpose of the present invention is to provide an aluminum evaporation equipment for semiconductor thyristor processing, which can feed materials without interruption, and can detect the internal processing conditions to ensure the safety of aluminum evaporation, so as to solve the problem of existing tungsten rod melting Part of the processing time when the feeding of aluminum wire is interrupted will waste the energy in the closed space, resulting in the energy consumption of a lot of aluminum evaporators. It is necessary to replenish the energy loss to evaporate the aluminum wire. The processing is not coherent, and the internal processing environment cannot be detected, resulting in internal failures. The problem of serious consumption of aluminum wire due to feeding

Images