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Resonator with built-in release hole structure

A technology for releasing holes and resonators, applied in the field of resonators, can solve problems such as large device size, and achieve the effect of saving layout area

Pending Publication Date: 2021-12-31
武汉敏声新技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In view of the problems existing in the background technology, the present invention provides a resonator with a built-in release hole structure, which is used to optimize the arrangement of the release holes in the device structure, thereby solving the problem of excessive device size caused by the traditional release structure

Method used

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  • Resonator with built-in release hole structure

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] Such as figure 2 As shown, the top view of the resonator with built-in release hole structure in Example 1, the structure includes a top electrode 13 and a release hole structure 14, the release hole structure is circular and located in the middle of the effective working area of ​​the device.

Embodiment 2

[0022] Such as image 3 As shown, the top view of the resonator with built-in release hole structure in Example 2, the structure includes a top electrode 13 and a release hole structure 14, and the release hole structure is a plurality of identical ellipses, which are respectively located in the middle part of the effective working area of ​​the device.

Embodiment 3

[0024] Such as Figure 4 As shown, the top view of the resonator with built-in release hole structure in Example 3, the structure includes a top electrode 13 and a release hole structure 14, and the release hole structure is a plurality of different semi-elliptical shapes, which are respectively located at the edge of the effective working area of ​​the device.

[0025] Such as Figure 5 Shown is the impedance curve diagram of Embodiment 3 of the present invention, that is, the beneficial effect diagram. As can be seen from the figure, compared with the conventional structure without built-in release holes, the device quality factor (resonance point Q s value and the antiresonance point Q p value) is higher, which means that the energy loss of the device is less and the performance of the device is better.

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Abstract

The invention discloses a resonator with a built-in release hole structure, and particularly relates to a film bulk acoustic resonator with a high quality factor and a built-in release hole structure. According to the resonator, a bottom electrode and a top electrode are distributed on the surface of a piezoelectric layer, and one or more release holes exist in a working area of the resonator. The resonator can be constructed by a filter, a duplexer and the like. A filter, a duplexer and the like built by using the resonator not only have high quality factors, but also can enable the structural layout to be more compact and reduce the device area.

Description

technical field [0001] The invention relates to the technical field of resonators, in particular to a resonator with a built-in release hole structure. Background technique [0002] MEMS radio frequency devices play an extremely important role in the field of communication. RF front-end devices (especially filters) must meet the requirements of high frequency, integration, miniaturization, low power consumption, high performance, and low cost. Among them, bulk acoustic wave resonators (Bulk Acoustic Wave Resonators) and their filters occupy a dominant position in the mainstream market due to their unique advantages. The above-mentioned resonators are the core components that make up the RF front-end filter. [0003] The longitudinal working area of ​​thin film bulk acoustic wave device includes substrate, cavity, bottom electrode, piezoelectric layer and top electrode, etc. During the preparation process of the resonator and filter, the sacrificial layer in the cavity nee...

Claims

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Application Information

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IPC IPC(8): H03H9/17H03H9/02
CPCH03H9/171H03H9/02086
Inventor 孙成亮罗天成蔡耀刘炎邹杨高超龙开祥
Owner 武汉敏声新技术有限公司