Manufacturing method of patch type thrust pressure gas bearing

Abstract

The invention relates to a manufacturing method of a patch type thrust pressure gas bearing. According to the manufacturing method of the patch type thrust pressure gas bearing, a micro groove structure of the thrust pressure gas bearing is indirectly machined by adopting a patch type method that a metal foil micro groove plane is preformed and a preformed metal foil is fixedly arranged on a working surface; compared with the prior art, the machining difficulty is greatly reduced, the efficiency is high, and the cost is low; the machining of micro grooves with extremely complex specifications (including variable groove depths) is easy to realize; and the difference between the gas bearing working face micro-groove and bearing base material selection and material treatment can be realized.

Description

technical field [0001] The invention relates to a manufacturing method of a patch type thrust pressure gas bearing. Background technique [0002] When manufacturing thrust pressure gas bearings with micro-groove structures on the working surface, the key point is to process micro-scale groove structures (such as spiral grooves, stepped grooves, etc.) on the axial working surface to meet the required dimensional accuracy. The groove structure is often machined on the working surface of the thrust bearing seat. At present, the processing methods suitable for forming micro-grooves on the working face of thrust pressure gas bearings mainly involve two types of processing technologies: ultra-precision processing technology and special processing technology. Ultra-precision machining technologies include precision turning, precision milling, precision grinding, and diamond flying cutting, etc. Special processing technologies include electrochemical micromachining, laser beam mach...

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Problems solved by technology

[0003] When adopting the aforementioned ultra-precision machining technology to form gas bearing micro-grooves, the rapid development of micro machine tool technology and Numerical control technology can realize the formation of micro-grooves equal to or smaller than the micron scale, but this method has the following disadvantages: low processing efficiency, high cost of batch processing; small-scale tools, special-shaped grinding wheels, etc. are easy to wear, and the processing accuracy is reduced; mechanical processing Inevitably cause metal surface damage, reduce fatigue strength, etc.

[0004]When using the aforementioned special processing technology to form gas bearing micro-grooves, most of the obtained micro-grooves can meet the application requirements and different processing technologies have their own advantages, specifically For example, the use of electrochemical micromachining can obtain extremely high groove forming accuracy, the use of EDM can be used for any conductive material without stress and burrs in the processing process, and the use of laser beam processing has high processing efficiency, etc., but such The method also has the following deficiencies to varying degrees: low processing efficiency, high cost of batch processing; difficult and easy to wear electrodes; high-energy beam processing has a heat-affected zone, and the groove accuracy is limited, etc.

[0005]It is worth noting that the above-mentioned micro-groove processing technologies are all direct forming processing technologies, and it is difficult to perform batch processing of micro-grooves with extremely complex specifications

In addition, because the micro-grooves are directly processed on the base material, it is difficult to realize the difference in the treatment of the micro-grooves and the base material, let alone the difference in material selection

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