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Substrate processing system and method thereof

A substrate processing and substrate technology, which is applied in the field of solar cells, can solve the problems of damaging substrates, affecting the quality of finished solar cell modules, and prone to particles on the surface of substrates, etc.

Active Publication Date: 2022-01-07
DUAL HELIOS SEMICON EQUIP CO INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At the same time, the substrate needs to be turned over to complete the deposition of plasma on the back side of the substrate, but in doing so, on the one hand, the flipped substrate has to clamp the substrate, and the clamping action may damage the substrate; , the diffusion of plasma will cause particles to easily occur on the surface of the substrate, which will affect the quality of finished solar cell modules

Method used

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  • Substrate processing system and method thereof
  • Substrate processing system and method thereof
  • Substrate processing system and method thereof

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Embodiment Construction

[0151] The technical solutions in the embodiments of the present invention will be described below with reference to the drawings in the embodiments of the present invention. Wherein, in the description of the embodiments of the present invention, the terms used in the following embodiments are only for the purpose of describing specific embodiments, and are not intended to limit the application. As used in the specification and appended claims of this application, the singular expressions "a", "the", "above", "the" and "this" are intended to also include, for example, "a or more" unless the context clearly indicates otherwise. It should also be understood that in the following embodiments of the present application, "at least one" and "one or more" refer to one or more than two (including two). The term "and / or" is used to describe the association relationship of associated objects, indicating that there may be three relationships; for example, A and / or B may indicate: A exi...

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Abstract

The invention provides a substrate processing system and a method thereof. The substrate processing system comprises a frame provided with a frame opening; and a film configured to be coupled to the frame and cover at least a portion of the frame opening, the film comprising a film opening, wherein a film opening area of the film opening is equal to or smaller than a frame opening area of the frame opening; wherein the film is configured to be coupled with the substrate, the substrate covers the film opening when the substrate is coupled with the film, and the film is configured to maintain the substrate at a set position relative to the frame; the area of the film opening is smaller than the total area of the substrate. According to the processing method based on the substrate processing system, the substrate can be prevented from being turned over, and the finished product quality of a solar cell module is improved.

Description

technical field [0001] The invention relates to the field of solar cells, in particular to a substrate processing system and method thereof. Background technique [0002] Solar cells, also known as photovoltaic cells, are power generation technologies that use the photovoltaic effect to directly convert solar radiation into electrical energy. They have the advantages of sufficient resources, cleanliness, safety, and long service life, and are considered to be one of the most promising renewable energy technologies. one. [0003] At present, silicon heterojunction cells in solar cells have the advantages of low-temperature preparation, simple process steps, superior temperature coefficient, and good product stability, and are expected to become one of the mainstream technologies in the photovoltaic industry. The silicon heterojunction cell includes: a single crystal silicon substrate, after texturing the front and rear surfaces of the single crystal silicon substrate, and th...

Claims

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Application Information

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IPC IPC(8): H01L31/18H01L21/67H01L21/205H01L21/203
CPCH01L31/18H01L21/67155H01L21/0262H01L21/02631Y02P70/50
Inventor 雷仲礼
Owner DUAL HELIOS SEMICON EQUIP CO INC