Laser radar and photomask cleaning device, control method and control device thereof

Abstract

The invention provides a laser radar and a photomask cleaning device, a control method and a control device thereof. The photomask cleaning device comprises a cleaning part, wherein the cleaning part comprises a cleaning component, a first magnetic component and a second magnetic component, the cleaning component is suitable for cleaning the outer surface of a photomask of the laser radar, and the first magnetic component is connected with the cleaning component; and the second magnetic component is arranged on an optical machine rotor of the laser radar and is suitable for being matched with the first magnetic component to drive the cleaning component to rotate along the outer surface of the photomask. According to the photomask cleaning device provided by the invention, the cleaning part is adsorbed on the outer surface of the photomask and rotates along the outer surface of the photomask to clean the photomask under the action of the magnetic attraction force between the second magnetic component of the optical machine rotor and the first magnetic component of the cleaning part, the structure of the photomask cleaning device is simplified, the occupied space when the photomask cleaning device is used is reduced, the cleaning work of the photomask cleaning device and the detection work of the laser radar can be carried out at the same time, and the influence on the normal work of the laser radar is small.

Description

technical field [0001] The present invention relates to the field of environmental perception, and in particular to a laser radar and its photomask cleaning device, control method and control device. Background technique [0002] Lidar is an important sensor to perceive the surrounding environment information. When detecting the surrounding environment, the laser array of the Lidar can be used to send out a detection beam to detect the target. The detection beam is reflected by the target to generate an echo beam. The echo beam After being received by the detector array of the lidar and processed, the surrounding environment information can be obtained. [0003] The laser radar includes a mask, which is an important component to protect the laser array, detector array, and the corresponding drive chip and readout chip from working normally. Because the working environment of the laser radar will form a lot of dust on the mask, Sewage, mud and frost, etc., which will cause t...

AI Technical Summary

Problems solved by technology

However, the above-mentioned photomask cleaning device has many components and a relatively complicated structure, which leads to difficulty in control, and it is difficult to fit the entire radar photomask, and the arrangement of each component takes up a large space

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