Nano-grating three-axis MEMS gyroscope capable of reducing cross coupling crosstalk

Abstract

The invention belongs to the technical field of nano-grating three-axis MEMS gyroscopes, and particularly relates to a nano-grating three-axis MEMS gyroscope capable of reducing cross coupling crosstalk, the nano-grating three-axis MEMS gyroscope comprises an upper-layer grating, a lower-layer grating, a driving magnet and a base, the upper-layer grating, the lower-layer grating and the driving magnet are all arranged in the base, the upper-layer grating is arranged on the lower-layer grating, and the lower grating is arranged on the driving magnet. According to the invention, an SOI processing scheme is used, and the gyroscope structure is in a highly symmetrical state, so that the gravity centers of the x-axis grating gyroscope and the y-axis grating gyroscope are positioned at the center of the structure, the influence of cross coupling on the three-axis gyroscope test is effectively avoided, and the sensitivity of the grating gyroscope is improved. Meanwhile, anodic bonding and SOI processing technologies are adopted, so that the distance between the double-layer gratings in the plane can be accurately controlled, and the sensitivity of the three-axis gyroscope is improved.

Description

technical field [0001] The invention belongs to the technical field of nano-grating three-axis MEMS gyroscope, and in particular relates to a nano-grating three-axis MEMS gyroscope that reduces cross-coupling and crosstalk. Background technique [0002] The micro-inertial system consists of a micro-mechanical gyroscope and a micro-mechanical accelerometer, and the micro-mechanical gyroscope is mainly used to measure the angular velocity of an object. Compared with traditional sensors, MEMS gyroscopes have developed rapidly due to their unique advantages of small size, low power, light weight, mass production, low price, strong overload resistance and integration. It has very important application value in military fields such as guidance and unmanned aerial vehicles and civilian fields such as car navigation and maritime positioning. [0003] Most of the micro-electromechanical gyroscopes currently researched are based on capacitive detection. Although capacitive measuremen...

AI Technical Summary

Problems solved by technology

However, most of the current gyro processing uses silicon-based etching, and this method is difficult to ensure the parallelism and distance between the two gratings due to the influence of processing errors and other factors, which will affect the sensitivity of the gyro, Yield has a huge impact

And in the actual measurement, under the action of acceleration, the gyroscope is affected by cross-coupling crosstalk, which has a huge impact on the accuracy of the micro grating gyroscope

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