Test method and device for CMP equipment control software and electronic equipment

A technology of equipment control and control software, applied in the direction of program control, general control system, electrical testing/monitoring, etc., can solve the problems of no CMP equipment control software, loss, etc., to improve self-adaptive ability, improve completeness, and ensure reliability Effects of Sex and Stability

Pending Publication Date: 2022-02-25
BEIJING SEMICORE PRECISION MICROELECTRONICS EQUIP CO LTD
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Problems solved by technology

In the production line, the triggering of any vulnerability may cause immeasurable losses
Therefore, the comprehensiveness of the control software test is

Method used

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  • Test method and device for CMP equipment control software and electronic equipment
  • Test method and device for CMP equipment control software and electronic equipment
  • Test method and device for CMP equipment control software and electronic equipment

Examples

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[0022] In order to make the purposes, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments These are some embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts shall fall within the protection scope of the present invention.

[0023] The technical features involved in the different embodiments of the present invention described below can be combined with each other as long as there is no conflict with each other.

[0024] see figure 1 , the testing method of a kind of CMP equipment control software that the embodiment of the present invention provides, specificall...

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Abstract

The invention discloses a test method and device for CMP equipment control software and electronic equipment. The method comprises the steps of carrying out the functional analysis of a target module of the control software, and obtaining a target function; determining a target test category in the test categories of the target module so as to test an upper-layer function logic or a bottom-layer code of the control software; generating a test case of the target test category according to the target function; and testing the target module based on the test case. According to the technical scheme provided by the invention, the function of each function module of the CMP control software is analyzed, so that the test cases of a black box test and a white box test conforming to the module functions are correspondingly generated, the function of carrying out complete test on the CMP control software is realized, and the reliability of the CMP control software is improved.

Description

technical field [0001] The invention relates to the technical field of testing equipment control software, in particular to a testing method, device and electronic equipment for CMP equipment control software. Background technique [0002] Special equipment for semiconductors is mainly used for mass automatic production of crystalline silicon and brittle and hard materials. Special equipment for semiconductors is a highly technological equipment, and chemical mechanical polishing (CMP) equipment for semiconductor wafers also has a strong process and efficiency requirements. Whether CMP equipment can meet the requirements of process and efficiency depends on the reliability and stability of its control software. For CMP equipment, due to the complex mechanism, numerous modules, and frequent and complex interactions between modules, the reliability of the control software logic is highly required. Due to the high process requirements, there are also high requirements for the...

Claims

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Application Information

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IPC IPC(8): G05B23/02
CPCG05B23/0256G05B2219/24065
Inventor 侯为萍周庆亚杨元元张文斌孟晓云
Owner BEIJING SEMICORE PRECISION MICROELECTRONICS EQUIP CO LTD
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