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Test method and device for CMP equipment control software and electronic equipment

A technology of equipment control and control software, applied in the direction of program control, general control system, electrical testing/monitoring, etc., can solve the problems of no CMP equipment control software, loss, etc., to improve self-adaptive ability, improve completeness, and ensure reliability Effects of Sex and Stability

Pending Publication Date: 2022-02-25
BEIJING SEMICORE PRECISION MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the production line, the triggering of any vulnerability may cause immeasurable losses
Therefore, the comprehensiveness of the control software test is directly related to the stability and reliability of the equipment, and there is currently no complete test plan for the control software of CMP equipment

Method used

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  • Test method and device for CMP equipment control software and electronic equipment
  • Test method and device for CMP equipment control software and electronic equipment
  • Test method and device for CMP equipment control software and electronic equipment

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Embodiment Construction

[0022] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts fall within the protection scope of the present invention.

[0023] The technical features involved in different embodiments of the present invention described below may be combined with each other as long as they do not constitute a conflict with each other.

[0024] see figure 1 A method for testing a CMP device control software provided by an embodiment of the present invention specifically includes the following s...

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Abstract

The invention discloses a test method and device for CMP equipment control software and electronic equipment. The method comprises the steps of carrying out the functional analysis of a target module of the control software, and obtaining a target function; determining a target test category in the test categories of the target module so as to test an upper-layer function logic or a bottom-layer code of the control software; generating a test case of the target test category according to the target function; and testing the target module based on the test case. According to the technical scheme provided by the invention, the function of each function module of the CMP control software is analyzed, so that the test cases of a black box test and a white box test conforming to the module functions are correspondingly generated, the function of carrying out complete test on the CMP control software is realized, and the reliability of the CMP control software is improved.

Description

technical field [0001] The invention relates to the technical field of testing equipment control software, in particular to a testing method, device and electronic equipment for CMP equipment control software. Background technique [0002] Special equipment for semiconductors is mainly used for mass automatic production of crystalline silicon and brittle and hard materials. Special equipment for semiconductors is a highly technological equipment, and chemical mechanical polishing (CMP) equipment for semiconductor wafers also has a strong process and efficiency requirements. Whether CMP equipment can meet the requirements of process and efficiency depends on the reliability and stability of its control software. For CMP equipment, due to the complex mechanism, numerous modules, and frequent and complex interactions between modules, the reliability of the control software logic is highly required. Due to the high process requirements, there are also high requirements for the...

Claims

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Application Information

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IPC IPC(8): G05B23/02
CPCG05B23/0256G05B2219/24065
Inventor 侯为萍周庆亚杨元元张文斌孟晓云
Owner BEIJING SEMICORE PRECISION MICROELECTRONICS EQUIP CO LTD
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