Cluster ion beam nanometer processing equipment control device and control method thereof
A nanofabrication and equipment control technology, applied in nanotechnology, discharge tubes, electrical components, etc., can solve the problems of inability to measure nanocluster performance, poor dynamic response performance, phase pollution, etc., to improve dynamic response performance, guarantee Consistency and stability, guaranteed effect of particle size and purity requirements
Pending Publication Date: 2022-03-04
广东如动纳米科技有限公司
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[0008] The purpose of the present invention is to provide a cluster ion beam nano-processing equipment control device and its control method, aiming to solve the problems of component deviation, phase pollution and inability to realize the performance of nano-clusters in the existing nano-processing technology. Problems such as poor measurement and dynamic response performance
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[0032]The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0033] see figure 1 , a cluster ion beam nanoprocessing equipment control device provided by the present invention, including a system control board, a human-computer interaction module, a process control module, a data acquisition module, a nanoprocessing control module and a material delivery module, the human-computer interaction The module, the process control module, the data acquisition module, the nano-processing control module and the material delivery ...
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The invention provides a cluster ion beam nanometer processing equipment control device and a control method thereof, and the device comprises a system control panel, a man-machine interaction module, a process control module, a data collection module, a nanometer processing control module, and a material conveying module. The man-machine interaction module, the process control module, the data acquisition module, the nano processing control module and the material conveying module are electrically connected with the system control panel respectively; the invention further provides a control method of the cluster ion beam nanometer machining equipment. The control method comprises the steps that parameters of the nanometer material are set; processing procedures are managed in real time and executed in a parallel processing mode; the particle size of the nanocluster is detected in real time, and discharging is carried out when set conditions are met. According to the cluster ion beam nano-processing equipment control device and control method provided by the invention, the consistency and stability of the particle size of the nano-cluster are realized, the component deviation and phase pollution are reduced to the greatest extent, and the dynamic response performance of the system is greatly improved.
Description
technical field [0001] The invention relates to the field of nanomaterial processing, in particular to a cluster ion beam nanoprocessing equipment control device and a control method thereof. Background technique [0002] Nanomaterials are also called ultrafine crystal materials. The particle size of their clusters is between 1nm and 100nm. They have unique and excellent physical properties such as small size effects, quantum effects, interface effects and surface effects. They are used in ceramics, microelectronics , chemical, medical and other fields have broad application prospects. In the past ten years, the preparation methods, performance tests and theoretical explanations of nanomaterials have become hot research issues in various countries, and fruitful theoretical and applied research results have been achieved. [0003] As far as the processing technology of nanomaterials is concerned, there are mainly preparation methods such as mechanical ball milling method, mo...
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IPC IPC(8): H01J37/304H01J37/302B82Y40/00
CPCH01J37/304H01J37/3023B82Y40/00
Inventor 李应高
Owner 广东如动纳米科技有限公司