High-precision miniature torque sensor based on fiber bragg grating
A fiber optic Bragg and torque sensor technology, applied in instruments, torque measurement, measuring devices, etc., can solve the problems of poor sensor measurement force sensitivity, low torque resolution, small sensor measurement range, etc., and achieve high sensitivity and linearity, The effect of high torsional sensitivity and strong anti-torsional crosstalk performance
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Embodiment 1
[0034] Embodiment 1: as Figures 1 to 3 As shown, a high-precision miniature torque sensor based on fiber Bragg gratings is mainly composed of a torsion-sensitive flexure structure, a fiber Bragg grating and a signal processing unit.
[0035] Wherein: the torsion-sensitive deflection structure includes a top plate 1, a bottom plate 2, a top beam 3, a plurality of support columns 4 and four inclined beams 5; the top plate 1 and the bottom plate 2 are connected by a plurality of support columns 4 fixed, the top beam 3 is connected to the top plate 1, the top beam 3 is provided with a first optical fiber fixing part 31, and the four inclined beams 5 are evenly arranged at intervals of 90° along the circumferential direction of the top plate 1 or bottom plate 2, and respectively Connected with the top beam 3 and the bottom plate 2; the inclination angle between each of the slanting beams 5 and the bottom plate 1 is 45°, and each of the support columns 4 is perpendicular to the top...
Embodiment 2
[0047] Embodiment 2: In this embodiment, the torque sensor described in Embodiment 1 is mainly verified by the following experiments including sensitivity, linearity, measurement range, torque resolution, anti-interference performance and measurement accuracy and other indicators:
[0048] like Image 6 As shown, the experimental device used mainly includes: a three-axis linear fine-tuning mobile platform 14 that is provided with an ATI force sensor, an experimental platform 13 (comprising an XY mobile platform and an XYZ manual mobile platform) that loads the torque sensor described in Embodiment 1, a power supply 9, Data acquisition equipment (NI acquisition card 10), computer 8, fiber grating demodulator 7; Wherein: ATI force sensor is used for testing miniature torque sensor of the present invention, concrete experiment is as follows:
[0049] (1) Calibration experiment: the ATI force sensor is installed on the three-axis linear fine-tuning mobile platform 14, and the load...
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