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Optical filter and corresponding manufacturing method

An optical filter and grating technology, applied in the field of optical devices and optical filters, can solve the problem that conventional band-stop filters cannot be used, etc.

Pending Publication Date: 2022-03-11
STMICROELECTRONICS SRL +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] However, conventional bandstop filters cannot be used in applications that require the use of wavelengths close to or within the filter band, for example, in applications using infrared signals of the TOF (time-of-flight) measurement type, infrared facial recognition or night vision cameras middle

Method used

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  • Optical filter and corresponding manufacturing method
  • Optical filter and corresponding manufacturing method
  • Optical filter and corresponding manufacturing method

Examples

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Embodiment Construction

[0057] Figure 1A to Figure 1E A method is shown for manufacturing an optical filter FLT1 dedicated to the exclusion of interference wavelengths from the spectrum of light incident on the filter. By reflecting light of the interfering wavelengths on the periodic grating RP, selective rejection of the interfering wavelengths can be obtained.

[0058] The periodic grating RP is configured such that light at the interference wavelength produces constructive interference on one side of the periodic grating receiving light and destructive interference on the other side of the periodic grating, with the rest of the received light passing through the periodic grating transmission.

[0059] Figure 1A The sacrificial substrate seed S on which the optical filter FLT1 is fabricated is shown. The substrate seed S is for example made of silicon or silicon oxide and is intended to be removed at the end of the manufacturing process.

[0060] On the substrate seed S is formed a first ant...

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Abstract

The embodiment of the invention relates to an optical filter and a corresponding manufacturing method thereof. An optical filter includes a carrier layer made of a first material. The periodic gratings of the pillars are arranged on the carrier layer in a periodic pattern configured by feature dimensions. The columns are made of a second material. A layer made of a third material surrounds the periodic grating of the pillars and covers the carrier layer. The third material has a refractive index different from a refractive index of the second material. The periodic grating of the column has a feature size smaller than the interference wavelength and is configured to selectively reflect light at the interference wavelength on the periodic grating of the column.

Description

[0001] priority claim [0002] This application claims the benefit of priority from French Patent Application No. 2009213, filed September 11, 2020, the contents of which are hereby incorporated by reference in their entirety to the fullest extent permitted by law. technical field [0003] The present invention relates to the field of optics and more particularly to the field of optical filters located eg towards integrated optical assemblies. Background technique [0004] Integrated optical components that are sensitive to external light may be exposed to a large amount of interfering light from third-party electronics during their service life, such as high-energy laser radiation. [0005] Therefore, depending on the material of the integrated optical component and the received energy, the light received by the component will be converted into electrons and / or will locally increase the temperature of the component from tens to hundreds of degrees. Thus, this heating can ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/20G02B5/28
CPCG02B5/203G02B5/28G02B5/281G02B5/285
Inventor O·勒内尔S·佐尔S·蒙弗莱
Owner STMICROELECTRONICS SRL
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