A kind of mems resonator and preparation method thereof

Abstract

The application of the present invention discloses a MEMS resonator and a preparation method thereof, which adopts a piezoresistive transducer composed of a DC bias, a T-shaped anchor structure and a piezoresistive beam, which has the advantage of low anchor loss, and at the same time makes it suitable for piezoresistive The converted piezoresistive beam does not serve as a support function, and the piezoresistive energy conversion efficiency can be improved by reducing the width of the piezoresistive beam; the two negative electrodes are connected through the beam of the T-shaped anchor structure, and the positive electrode is connected through the piezoresistive beam, so that the The bias current in the piezoresistive transducer arranged on the resonator will not flow through the resonator, preventing the temperature increase of the resonator caused by the Joule heating effect, thus avoiding the change of the elastic coefficient of the resonator caused by the temperature increase, and reducing the At the same time, because the bias current does not flow through the resonator, the length of the current path is short, thereby reducing the total power consumption, and can be widely used in the field of microelectronics technology.

Description

technical field [0001] The invention relates to the technical field of microelectronics, in particular to a MEMS resonator and a preparation method thereof. Background technique [0002] With the rapid development of wireless communication, clock and frequency control has become a hot research direction. Quartz resonators have dominated the clock and frequency control market for more than half a century with their excellent temperature stability and phase noise characteristics. However, with the increasing demands for miniaturization and integration, the disadvantages of quartz resonators, such as large size and incompatibility with integrated circuit technology, have become increasingly prominent. [0003] Micro Electro Mechanical System (Micro Electro Mechanical System, MEMS) is a technology that has developed rapidly in recent years, and has been widely used in various physical fields (including mechanical, electrical, thermal, chemical and magnetic, etc.). Any device t...

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Problems solved by technology

However, among the various modes of the square body mode resonator, only the square telescopic mode has been reported to apply the T-shaped piezoresistive transducer, and other modes such as the square Lame mode and the square shear mode have been reported. No suitable piezoresistive transducer

Secondly, although the T-type piezoresistive transducer has improved energy conversion efficiency compared with the electrostatic transducer, it is difficult to further improve the energy conversion efficiency because the structure also plays a supporting function and needs to ensure a certain width.

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