MEMS resonator and preparation method thereof

Abstract

According to the MEMS resonator and the preparation method thereof, a piezoresistive transducer composed of a direct current bias, a T-shaped anchor structure and a piezoresistive beam is adopted, the advantage of low anchor loss is achieved, meanwhile, the piezoresistive beam used for piezoresistive transduction does not have a supporting function, and the piezoresistive transduction efficiency can be improved by reducing the width of the piezoresistive beam; the cross beam of the T-shaped anchor structure is connected with the two negative electrodes and is communicated with the positive electrode through the piezoresistive beam, so that bias current in the piezoresistive transducer arranged on the resonance body cannot flow through the resonance body, the temperature rise of the resonance body caused by the Joule heating effect is prevented, the change of the elastic coefficient of the resonance body caused by the temperature rise is avoided, and the reliability of the resonance body is improved. The deviation degree of the resonant frequency is relieved; meanwhile, the bias current does not flow through the resonant body, so that the length of a current path is relatively short, the total power consumption is further reduced, and the circuit can be widely applied to the technical field of microelectronics.

Description

technical field [0001] The invention relates to the technical field of microelectronics, in particular to a MEMS resonator and a preparation method thereof. Background technique [0002] With the rapid development of the wireless communication field, clock and frequency control has become a popular research direction. Quartz resonators have dominated the clock and frequency control market for over half a century with their excellent temperature stability and phase noise characteristics. However, with the increasing demand for miniaturization and integration, the shortcomings of quartz resonators such as large volume and incompatibility with integrated circuit technology have become increasingly prominent. [0003] Micro Electro Mechanical System (MEMS) is a technology that has developed rapidly in recent years and has been widely used in various physical fields (including mechanical, electrical, thermal, chemical and magnetic, etc.). Any device that includes components or ...

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Problems solved by technology

However, among the various modes of the square body mode resonator, only the square telescopic mode has been reported to apply the T-shaped piezoresistive transducer, and other modes such as the square Lame mode and the square shear mode have been reported. No suitable piezoresistive transducer

Secondly, although the T-type piezoresistive transducer has improved energy conversion efficiency compared with the electrostatic transducer, it is difficult to further improve the energy conversion efficiency because the structure also plays a supporting function and needs to ensure a certain width.

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