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MEMS omnibearing fluid vector flow velocity sensor

A flow rate sensor, all-round technology, applied in the field of microelectronics, which can solve the problems of single function, low precision, and large volume of fluid sensors

Active Publication Date: 2022-03-22
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0002]Traditional fluid sensors are bulky and can only be used to measure fluid velocity or determine fluid flow direction. They have a single function, limited measurement range, and relatively high accuracy Low

Method used

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  • MEMS omnibearing fluid vector flow velocity sensor
  • MEMS omnibearing fluid vector flow velocity sensor
  • MEMS omnibearing fluid vector flow velocity sensor

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Embodiment Construction

[0027] The implementation of the present invention will be described in detail below in conjunction with the accompanying drawings and examples, so as to fully understand and implement the process of how to apply technical means to solve technical problems and achieve corresponding technical effects in the present invention. The embodiments of the present application and the various features in the embodiments can be combined with each other under the premise of no conflict, and the formed technical solutions are all within the protection scope of the present invention.

[0028] figure 1 and figure 2 The schematic diagram and the Bimorph structure of the Bimorph structure of the MEMS omni-directional fluid vector velocity sensor according to an embodiment of the present disclosure are respectively shown

[0029] Structure connecting the substrate and the driving arm.

[0030] The Bimorph structure is a cantilever beam structure composed of two material layers combined toget...

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Abstract

The MEMS omni-directional fluid vector flow velocity sensor comprises a substrate, a movable detection device and a fixed detection device, and the substrate is used for bearing the movable detection device and the fixed detection device; the movable detection device structurally comprises a Bimorph driving arm and a central bearing platform, wherein the Bimorph driving arm is used for connecting a substrate and supporting the central bearing platform; the central bearing platform is provided with a detection thermistor and a heat source and is used for detecting the flow direction and the flow speed of fluid; the fixed detection device is located on the substrate, comprises a detection thermistor and a heat source and is used for detecting the flow direction and the flow speed of fluid. The device can realize all-directional fluid flow direction measurement and flow velocity measurement, and has the advantages of small size, low power consumption, long service life, excellent performance, batch production, low cost and the like.

Description

technical field [0001] The invention belongs to the technical field of microelectronics, and in particular relates to a MEMS omnidirectional fluid vector velocity sensor. Background technique [0002] Traditional fluid sensors are bulky and can only be used to measure fluid flow velocity or determine fluid flow direction. They have a single function, limited measurement range, and relatively low accuracy. In comparison, the devices made by the MEMS process are small in size, low in power consumption, long in life, capable of mass production and low in cost, and have excellent performance. [0003] The fluid sensor can simultaneously realize the measurement of gas and liquid flow velocity and flow direction. The fluid detection device is located on a platform supported by the Bimorph driving arm. By giving the Bimorph driving arm an excitation signal, the angle and attitude of the platform can be adjusted. The device can automatically capture the flow direction of the fluid ...

Claims

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Application Information

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IPC IPC(8): G01P5/10G01P13/02B81B7/02
CPCG01P5/10G01P13/02B81B7/02
Inventor 任安润丁英涛谢会开
Owner BEIJING INSTITUTE OF TECHNOLOGYGY