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A transport system for silicon carbide crystal growth

A technology of crystal growth and conveying system, which is applied in the field of conveying system, can solve the problems of being stuck, unable to crush lumpy materials into powdery materials, etc., and achieve the effect of solving the effect of co-solvent inclusion

Active Publication Date: 2022-05-17
常州臻晶半导体有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The traditional paddle stirring will get stuck when stirring for a long time. At the same time, there are lumpy materials in the reaction material, and the lumpy materials cannot be crushed into powdery materials.

Method used

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  • A transport system for silicon carbide crystal growth
  • A transport system for silicon carbide crystal growth
  • A transport system for silicon carbide crystal growth

Examples

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Embodiment 1

[0036] In this example, if Figure 1 to Figure 5 As shown, this embodiment provides a transport system for silicon carbide crystal growth, which includes: a first reaction kettle 1, a screw mechanism 2, a movable plate 3, a mounting plate 4, a crushing mechanism 5, a stirring mechanism 6 and a conveying mechanism 7; Wherein the first reaction kettle 1 is provided with a storage cavity for storing materials; the screw mechanism 2 is longitudinally arranged in the first reaction kettle 1, and the movable plate 3 is movably connected to the screw mechanism 2 Above, the installation disk 4 is fixed on the bottom of the movable disk 3, the crushing mechanism 5 is fixed on the bottom of the installation disk 4, and the stirring mechanism 6 is movably arranged on the circumferential direction of the installation disk 4; the screw mechanism 2 drives The movable disk 3 moves longitudinally, and the movable disk 3 rotates on the screw mechanism 2 during the longitudinal movement, that i...

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Abstract

The invention belongs to the technical field of conveying systems, and specifically relates to a conveying system for growing silicon carbide crystals. The conveying system for growing silicon carbide crystals includes: a first reaction kettle, a screw mechanism, a movable plate, a mounting plate, a crushing mechanism, and a stirring mechanism and conveying mechanism; wherein the movable plate rotates on the screw mechanism during the longitudinal movement, that is, the installation plate drives the crushing mechanism to crush the bulk materials in the storage cavity; the installation plate drives the stirring mechanism to stir the materials in the storage cavity, and makes The material is gathered towards the crushing mechanism; in the present invention, the mounting plate can not only rotate but also move longitudinally, so that the stirring mechanism can stir the material evenly, and the crushing mechanism can play the role of grinding the material, and reduce the viscosity of the co-solvent in the second reaction kettle Or increase the rotation speed of the seed rod to achieve effective dissolution and transportation of carbon dissolution, and solve the problem of bubble inclusions by infiltrating the growth surface of the seed crystal or reducing the growth pressure.

Description

technical field [0001] The invention belongs to the technical field of conveying systems, and in particular relates to a conveying system for silicon carbide crystal growth. Background technique [0002] The growth of silicon carbide crystals requires the use of various reaction materials. The traditional stirring method is used to stir directly through the paddles. [0003] If the traditional paddle is stirred for a long time, it will be stuck. At the same time, there are massive materials in the reaction material, which cannot be crushed into powdery materials. [0004] Therefore, there is an urgent need to develop a new transport system for silicon carbide crystal growth to solve the above problems. Contents of the invention [0005] The object of the present invention is to provide a transport system for silicon carbide crystal growth. [0006] In order to solve the above technical problems, the present invention provides a transport system for silicon carbide crysta...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B35/00
CPCC30B35/005
Inventor 陆敏刘付冠郑红军
Owner 常州臻晶半导体有限公司
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