Gas sensor and manufacturing method thereof
A technology of gas sensor and manufacturing method, which is applied in the direction of instruments, scientific instruments, measuring devices, etc., and can solve the problems that the gas-sensing layer is easy to fall off, the bonding force between the gas-sensing layer and the ceramic substrate is uneven, and the coating of the gas-sensing material cannot be guaranteed. , to achieve the effect of not easy to disappear and stable gas sensitivity
Pending Publication Date: 2022-03-25
SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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Abstract
The invention discloses a manufacturing method of a gas sensor, which comprises the following steps: partially oxidizing a substrate to enable the oxidized part to become a gas sensitive part; wherein the substrate is made of a semiconductor material containing metal elements, and a heterojunction is formed between the gas sensitive part and the unoxidized part of the substrate. The problem that a gas sensitive layer of an existing gas sensor is prone to falling off is solved.
Application Domain
Material resistance
Technology Topic
Si substrateMaterials science +5
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