Super-resolution digital holographic measurement device and method based on array light source
An array light source and digital holography technology, applied in the direction of measuring devices, optical devices, instruments, etc., to achieve the effect of improving resolution, improving system stability, and wide application range
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[0026] The present invention will be described in detail below with reference to the drawings and embodiments.
[0027] A super-resolution digital holographic measurement device based on an array light source, such as figure 1 shown. It includes a computer 1, a power supply device 2 and an optical assembly, the optical assembly includes an array light source 3 and a collimating mirror 4, a first dichroic prism 5 and a first plane reflector 6 arranged in sequence on the light path of the array light source 3, the first A second beam-splitting prism 9 and a telecentric imaging lens 10 are arranged on the object optical path of the first plane mirror 6, and an image sensor 11 is positioned at the telecentric imaging lens on the reference optical path of a beam-splitting prism 5. 10 on the image plane and connected to the computer 1.
[0028] During the test, the sample 7 to be tested is arranged between the plane mirror 6 and the dichroic prism 9 and on the object plane of the ...
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Abstract
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