Vacuum pumping system

Abstract

The embodiment of the invention provides a vacuumizing system. The vacuumizing system comprises a container, a vacuum pump, a first exhaust pipeline, a front end valve, a first gas detector and a control system. The container comprises a vacuum cavity and a medium cavity, the medium cavity is used for containing hazardous gas, and the vacuum cavity and the medium cavity are isolated from each other. The first exhaust line connects the vacuum chamber of the container and the inlet of the vacuum pump. The front end valve is arranged on the first exhaust pipeline, and the first gas detector is arranged on the first exhaust pipeline and located on the upstream of the front end valve in the gas flowing direction. And when the concentration value represented by the concentration information of the first gas detector reaches a first preset value, the control system controls the front-end valve to be closed. According to the vacuumizing system, the control system detects the concentration value of the hazardous gas in the first exhaust pipeline according to the first gas detector, the front end valve is controlled to be opened and closed, and the hazardous gas is prevented from being exhausted into the outside atmosphere to cause environmental pollution and personnel harm.

Description

technical field [0001] The invention relates to obtaining vacuum degree in the field of chemical production, in particular to a pumping vacuum system. Background technique [0002] Chemical production involves the treatment of various toxic and harmful gases (such as CO (carbon monoxide) gas, BF 3 (boron trifluoride) gas) or flammable and explosive gases for adsorption, purification, pressurization, liquefaction, vaporization and rectification. The above process requires the medium chamber of the two-chamber container (the gases are usually stored in the medium chamber of the two-chamber container during production) to maintain a relatively high temperature or low temperature environment. In order to meet this condition, it is necessary to use a vacuum pump to continuously evacuate the vacuum chamber in the two-chamber container to ensure a high vacuum degree in the vacuum chamber, so that the medium chamber in the two-chamber container has a better heat insulation effect f...

AI Technical Summary

Problems solved by technology

In view of the fact that the vacuum chamber and the medium chamber of the two-chamber container are usually connected by a vacuum joint, the vacuum joint may cause toxic and harmful gases or flammable and explosive gases in the medium chamber to infiltrate into the vacuum chamber due to insufficient sealing performance. Explosive gas is discharged into the atmosphere after being extracted by the vacuum pump, causing environmental pollution

Therefore, the use of vacuum pumps alone in the past related technologies is not suitable for vacuuming operations involving toxic and harmful gases or flammable and explosive gases.

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