Cavity with air pressure measuring function

An air pressure measurement and cavity technology, which is applied in the direction of measuring fluid pressure, measuring fluid pressure through mechanical components, measuring devices, etc., can solve problems such as inconvenience in use, and achieve the effect of high air pressure detection sensitivity and convenient use.

Inactive Publication Date: 2022-04-15
李国强
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These traditional test methods need to set holes on the cavity wall, which is inconvenient to use

Method used

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  • Cavity with air pressure measuring function
  • Cavity with air pressure measuring function

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0019] The invention provides a cavity with air pressure measurement function. Such as figure 1 As shown, the chamber with air pressure measurement function includes a chamber wall 1 , a measurement window, an air inlet 3 , and an air outlet 4 . The cavity wall 1 is made of stainless steel. Further, the material of cavity wall 1 is 300 series stainless steel, which is a low-carbon steel containing Cr, which has the advantages of excellent corrosion resistance, high yield, non-magnetic, good welding performance, low electrical conductivity and thermal conductivity, etc. , able to work in a wide temperature range. The chamber wall 1 and the measurement window part enclose a chamber. That is to say, one piece will be provided as the measurement window portion on the entire cavity wall 1 . The air inlet 3 and the air outlet 4 are arranged on the chamber wall 1 . The air inlet 3 and the air outlet 4 do not face the silicon membrane 6, so as to prevent the flowing gas from affe...

Embodiment 2

[0022] On the basis of Example 1, the hole 5 is in the shape of a truncated cone, and the hole 5 is thicker on the inner side of the cavity; the hole 5 is thinner on the outer side of the cavity. In this way, the contact area between the silicon film 6 and the hole 5 is larger, and the hole 5 hinders the silicon film 6 less. 5 protrudes more, thereby changing the shape and size of the resonant cavity more, thereby changing the position of the resonant wavelength and the intensity of reflected light more, thereby achieving higher sensitivity air pressure detection. In this embodiment, air pressure detection can be realized by measuring the shift of resonance wavelength and the intensity of reflected light, which improves the accuracy of air pressure detection.

[0023] In this embodiment, when the silicon film 6 protrudes toward the hole 5, small-sized slits are formed between the silicon film 6 and the sidewall of the hole 5, and these small-sized slits can localize the incide...

Embodiment 3

[0026] On the basis of Example 2, the silicon film 6 is thinner at the center of the hole 5 and thicker at the edge of the hole 5 . That is to say, the thickness of the silicon film 6 is not uniform: at the hole 5, the silicon film 6 is thin, especially in the middle of the hole 5; on the silicon layer 5, the silicon film 6 is thick. In this way, the silicon film 6 can be firmly attached or adhered to the silicon layer 2; under the action of air pressure, the silicon film 6 can protrude more into the hole 5, especially at the center of the hole 5. , the silicon film 6 protrudes more into the hole 5, thereby changing the shape of the resonant cavity on the side of the silicon film 6 more, and also changing the size of the resonant cavity, thereby changing the resonant wavelength of the resonant cavity more And reflectance spectrum, so as to realize the detection of air pressure with higher sensitivity.

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Abstract

The invention relates to the technical field of air pressure measurement, in particular to a cavity with an air pressure measurement function, which comprises a cavity wall, a measurement window part, an air inlet and an air outlet, the cavity wall and the measurement window part enclose to form the cavity, the air inlet and the air outlet are arranged on the cavity wall, the measurement window part comprises a silicon layer and a silicon film, holes are periodically arranged in the silicon layer, and the silicon film is arranged in the cavity wall. The silicon film is arranged on the inner side of the cavity of the silicon layer, and the silicon film layer seals the hole. During application, gas in the cavity generates pressure to press the silicon film, so that the silicon film protrudes outwards. Incident light irradiates the hole from the outside of the cavity, the hole forms a resonant cavity, the size and the shape of the resonant cavity are changed by the outward protrusion of the silicon film, so that the resonant wavelength of the resonant cavity is changed, the movement of the resonant wavelength is detected by the optical detector, and the pressure detection in the cavity is realized. The device has the advantages of being convenient to use and high in air pressure detection sensitivity.

Description

technical field [0001] The invention relates to the technical field of air pressure measurement, in particular to a cavity with air pressure measurement function. Background technique [0002] Measuring pressure inside a sealed chamber is important for chemical reactions, gas transport, and more. The conventional method for measuring the pressure in the sealed cavity is to extend the probe into the sealed cavity. Or connect the gas to the detection device. For example, for a U-shaped tube manometer, the tube is filled with water or mercury. When one end of the U-shaped tube is connected to the cavity, when the pressure on the rubber membrane is zero, the liquid surface on both sides of the U-shaped tube is equal. When the liquid level in the two tubes produces a height difference, the greater the pressure, the greater the height difference between the two liquid levels, so the measured pressure can be known from the height difference of the liquid levels in the two tubes. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L7/00
Inventor 李国强
Owner 李国强
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