Full-automatic coiled material exposure machine

A fully automatic, exposure machine technology, applied in the field of exposure machines, can solve problems such as pulling, impact on coil quality, and impact on exposure quality, and achieve the effects of reducing impact, improving exposure effect, and improving exposure quality

Pending Publication Date: 2022-04-15
深圳市欣光辉科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This will pull the part near the exposure area on the coil, which will easily affect the quality of the coil and affect the exposure quality. Therefore, in view of the above status quo, it is urgent to develop a fully automatic coil exposure machine to overcome the current Deficiencies in practical application

Method used

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  • Full-automatic coiled material exposure machine
  • Full-automatic coiled material exposure machine
  • Full-automatic coiled material exposure machine

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Embodiment Construction

[0021] The technical solution of this patent will be further described in detail below in conjunction with specific embodiments.

[0022] Embodiments of the present patent are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary and are only used for explaining the patent, and should not be construed as limiting the patent.

[0023] see figure 1 , in one embodiment of the present invention, a fully automatic coil exposure machine, comprising: a housing 1 and an exposure device 3, the exposure device 3 is fixedly connected to the inside of the housing 1; a control mechanism, the control The mechanism is arranged on the inner side of the housing 1; the placement mechanism is arranged on the inner side of the housing 1 and is connected with th...

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Abstract

The invention relates to the technical field of exposure machines, in particular to a full-automatic coiled material exposure machine which comprises a shell and an exposure device fixedly connected to the inner side of the shell. The control mechanism is arranged on the inner side of the shell; the placing mechanism is arranged on the inner side of the shell and is connected with the control mechanism; wherein the control mechanism comprises a supporting assembly, and the supporting assembly is arranged on the inner side of the shell, connected with the placing mechanism and used for driving the placing mechanism to ascend and descend; the adjusting assembly is connected with the supporting assembly; the connecting assembly is arranged between the adjusting assembly and the placing mechanism, the control mechanism is arranged, and the adjusting assembly is matched with the connecting assembly, so that not only can the movement of the coiled material be realized, but also dust removal can be carried out on air, the exposure effect of the device is greatly improved, and the exposure quality is improved.

Description

technical field [0001] The invention relates to the technical field of exposure machines, in particular to a fully automatic coil exposure machine. Background technique [0002] The exposure machine was developed on the basis of the scanning electron microscope in the early 1960s. It was widely used in the semiconductor integrated circuit manufacturing industry after the 1970s. Integrated complex semiconductor processing equipment. Under the control of the computer, the focused electron beam is used to expose the organic polymer (commonly known as electronic resist or photoresist). After being irradiated by the electron beam, the physical and chemical properties of the photoresist change. A well-dissolved or poorly soluble region is formed in the solvent, thereby forming a fine pattern on the resist. [0003] At present, when the exposure machine exposes a certain exposure area of ​​the coil, in order to achieve complete exposure in the length direction of a certain exposu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20
Inventor 代晓龙
Owner 深圳市欣光辉科技有限公司
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