Induction heating system of rotary silicon carbide crystal growth furnace and crystal growth furnace

A technology of rotating silicon carbide and induction heating, applied in the direction of single crystal growth, single crystal growth, crystal growth, etc., can solve the problems of the influence of the magnetic field distribution of the induction coil, the temperature field distribution in the furnace body, and the decrease of stability, etc., to achieve optimization. The effect of uniform magnetic field distribution, complex optimization structure, and low optimization stability

Pending Publication Date: 2022-04-29
NANJING CRYSTAL GROWTH & ENERGY EQUIP CO LTD
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AI Technical Summary

Problems solved by technology

However, the silicon carbide induction heating furnace in the prior art mainly adjusts the temperature field in the furnace body through the lifting of the induction coil and the rotation of the crucible, and the induction coil cannot rotate.
At the same time, because the deviation of the induction coil structure and installation will affect the distribution of the induction coil magnetic field
At the same time, during the crystal growth process, there is irregular vibration due to the rotation of the crucible, which will have a direct impact on the growth of the crystal.
The rotation of the crucible causes the complexity of the structure and the decrease of stability, thus affecting the distribution of the temperature field in the furnace

Method used

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  • Induction heating system of rotary silicon carbide crystal growth furnace and crystal growth furnace
  • Induction heating system of rotary silicon carbide crystal growth furnace and crystal growth furnace
  • Induction heating system of rotary silicon carbide crystal growth furnace and crystal growth furnace

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Embodiment Construction

[0018] Please combine figure 1 As shown, the present invention provides a rotary silicon carbide growth furnace induction heating system. The present invention is a new design that can realize rotation control on the basis of realizing the induction furnace magnetic field up and down, optimizes the induction furnace magnetic field distribution, and optimizes the interior of the furnace body. The device for sensing temperature distribution optimizes the complex structure and poor stability caused by the rotation of the crucible, including: rotating power 1; transmission mechanism part; water-cooled conductive ring 3; water-cooled conductive ring 4; induction coil 5; coil mounting seat 6; lower flange 7; support column 8; upper flange 9; first bottom inlet water-cooling cable joint 10; second bottom inlet water-cooling cable joint 11; The water-cooled conductive ring 3 is used as a rotating fixed seat, and includes a water-cooled conductive ring inner ring 3-1 and a water-cooled...

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Abstract

The invention discloses an induction heating system of a rotary silicon carbide crystal growth furnace. The induction heating system comprises a spiral induction coil and a base for bearing the induction coil. The base comprises a rotary fixing seat and a rotary support covering the rotary fixing seat; the induction coil is mounted on the rotary support, and the rotary support rotates to drive the induction coil to rotate along the central axis of the induction coil; the magnetic field distribution of the induction coil is controlled by regulating and controlling the rotation period and the rotation angle of the induction coil, so that the distribution of the temperature field is adjusted.

Description

technical field [0001] The invention belongs to the technical field of silicon crystal growth furnaces. Background technique [0002] The silicon carbide crystal growth furnace is a high-temperature furnace, which mainly adopts the medium frequency induction heating method, and the maximum design temperature can reach 2400°C. Since the medium frequency induction heating is mainly based on the principle of electromagnetic induction, high-density magnetic force lines are generated in the induction coil through medium frequency alternating current, and cut A crystalline material in an induction coil that creates large eddy currents and generates heat. The heating method has a fast heating speed and high production efficiency. [0003] For example, in the Chinese invention patent application whose publication number is 113136618A, a single crystal furnace is disclosed. In the single crystal furnace, an induction coil is used as a heating device, and the induction coil surround...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B35/00C30B29/36
CPCC30B35/00C30B29/36
Inventor 李辉毛瑞川毛洪英丁柏松苏闻峰
Owner NANJING CRYSTAL GROWTH & ENERGY EQUIP CO LTD
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