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Wafer-level reconfigurable Chiplet integrated structure

A wafer-level, substrate technology, applied in the field of wafer-level reconfigurable Chiplet integrated structure, can solve the problems of non-reconfigurable integrated structure, curing of integrated structure functions, etc., to improve power integrity and signal integrity , Solving the problem of process incompatibility, the effect of high system flexibility

Pending Publication Date: 2022-04-29
XIDIAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a wafer-level reconfigurable Chiplet integrated structure to solve the problem that the integrated structure does not have reconfigurability in the prior art, resulting in the solidification of the function of the integrated structure.

Method used

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  • Wafer-level reconfigurable Chiplet integrated structure
  • Wafer-level reconfigurable Chiplet integrated structure
  • Wafer-level reconfigurable Chiplet integrated structure

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Embodiment Construction

[0027] In order to make the implementation process of the present invention clearer, the following will be described in detail in conjunction with the accompanying drawings.

[0028] The present invention provides a wafer-level reconfigurable Chiplet integrated structure, which includes: a tube case 1, a first substrate 2, an RDL21, a second substrate 3, a first chamber 31, a first functional Chiplet 32, a second Chamber 33, second function Chiplet 34, third chamber 35, third function Chiplet 36, reconfigurable topology network 37, through hole 38, third substrate 4, Chiplet communication network 41, fourth substrate 5, micro bumps 6 , Solder ball 7.

[0029] The material of the first substrate 2 is one of silicon, ceramics, and glass. The material of silicon, ceramics, and glass is relatively hard, so that the first substrate 2 is not easily deformed, so that the first substrate 2 can provide mechanical support for the integrated structure of the present invention. , so that...

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Abstract

The invention belongs to the technical field of semiconductor packaging, and particularly relates to a wafer-level reconfigurable Chiplet integrated structure which comprises a tube shell, a first substrate, an RDL, a second substrate, a cavity, a functional Chiplet, a reconfigurable topology network, through holes, a third substrate, a Chiplet communication network, a fourth substrate, micro bumps and solder balls. The integrated structure sequentially comprises a third substrate, a fourth substrate, a Chiplet communication network, a second substrate, a cavity, a functional Chiplet, a reconfigurable topology network, a through hole, a micro bump, a first substrate, an RDL and a solder ball from top to bottom. The tube shell is arranged on the upper side of the fourth substrate, and the side end of the tube shell is fixedly connected with the first substrate. A wafer-level reconfigurable Chiplet integrated structure is adopted, a design normal form, which is high in cost, low in yield and high in design difficulty, of a traditional SoC-based integration technology can be converted into a wafer-level-based Chiplet integration direction which is larger in scale, higher in efficiency and lower in design difficulty, the reuse rate of the wafer-level Chiplet is further increased through the reconfigurable technology, and the manufacturing cost is greatly reduced.

Description

technical field [0001] The present application belongs to the technical field of semiconductor packaging, and in particular relates to a wafer-level reconfigurable Chiplet integration structure. Background technique [0002] Traditional SoCs have the problems of process incompatibility and design difficulty. With the further increase of process node scaling and integration scale, system function verification time increases, leakage power consumption continues to rise, and chip yield, reconfigurability, and reliability The scalability continues to decline, unable to meet the low-cost, high-performance system requirements of diversified application scenarios. This results in low integration efficiency, scalability, and poor yield of electronic systems, which restricts the development of high-performance, low-cost microsystems. [0003] The authorized patent number is "CN110473792B", and the patent title is "A Reconstruction Method for Integrated Circuit Wafer Level Packaging"...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L25/065H01L25/18H01L23/498H01L23/485
CPCH01L25/0655H01L25/18H01L23/49838H01L23/49827H01L23/49816H01L23/4824H01L23/485H01L2224/02331H01L2224/02381H01L2224/02379
Inventor 单光宝郑彦文杨子锋朱樟明李国良饶子为孟宝平
Owner XIDIAN UNIV