Water vapor in-situ calibration device for Raman probe, calibration method and application
A technology of calibration device and calibration method, applied in measurement device, Raman scattering, material excitation analysis, etc., can solve problems such as accuracy reduction, achieve the effect of improving accuracy, fast in-situ detection and accurate quantitative analysis, and improving convenience
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Embodiment 1
[0053] according to Figure 1 Assemble and connect the water vapor in-situ calibration device with the structure shown in the figure, install and fix the Raman probe 2 and the hygrometer 3 in the sealed calibration cabin, connect the probe with the Raman spectrometer 5 and the laser 7 respectively, and connect the Raman spectrometer 5, the hygrometer 3 and the pressure sensor 4 with the data collector 6; The calibration method is as follows: Figure 2As shown in, open the temperature and humidity generator 8, set the temperature to 23 ℃ and the relative humidity to 60%, draw the sealed calibration chamber 1 into a vacuum state, open the inflation port valve between the temperature and humidity generator 8 and the sealed calibration chamber 1, and close the inflation valve of the sealed calibration chamber 1 after the readings of the temperature and humidity meter 3 and the pressure sensor 5 are stable;
[0054] Start and turn on the power switches of laser 7, Raman spectrometer 5, t...
Embodiment 2-37
[0061] On the basis of example 1, set the relative humidity of the temperature and humidity generator to other values (the range of the set value of the relative humidity of the temperature and humidity generator can be adjusted according to the actual needs), and obtain groups 2 ~ 37 IW and P respectively according to the same operation W And Rh 20 Values, as shown in Table 2 below.
[0062] Table 2 example 2-37 single measurement data of different relative humidity (calibration data and calibration data)
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[0064]
[0065] According to IW and P obtained in examples 1 to 37 W And Rh 20 Data, and draw the water vapor partial pressure P respectively W . equivalent relative humidity RH 20 And water vapor Raman signal peak I W Standard working curve, e.g Figure 4 and Figure 5 As shown in, where Figure 4 Is a standard working curve drawn according to 37 groups of data from embodiment 1 to embodiment 37, Figure 5 It is a standard working curve drawn according to the data gr...
Embodiment 38
[0068] Verify the accuracy of the standard working curve, as follows: place the calibrated Raman probe in the space to be detected, set the parameters according to the same Raman spectrometer, collect the Raman spectrum of the space to be detected, and obtain the water vapor Raman signal peak I in the space to be detected W , according to the standard working curve, the water vapor partial pressure P of the space to be detected can be obtained W Or equivalent relative humidity RH 20 And compare it with the measured value of the thermometer and hygrometer to analyze the measurement error, as shown in Table 3 below.
[0069] Table 3 error analysis between the standard value calculated from the standard working curve and the actual measured value
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[0071]
[0072] It can be seen from table 3 that the Raman signal peak I of water vapor in the space to be detected is obtained according to the measurement W , using the standard working curve, the water vapor P in the detect...
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