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Preparation system and preparation method of diborane mixed gas

A technology for mixing gas and preparation system, which is applied in mixers, chemical instruments and methods, gas and gas/vapor mixing, etc., and can solve problems such as reducing the production efficiency of mixed gas

Pending Publication Date: 2022-05-10
沧州华宇特种气体科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In the prior art, for the temperature rise during the filling process, the method of natural cooling of the production environment air is generally adopted, and the waiting time reduces the production efficiency of the mixed gas

Method used

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  • Preparation system and preparation method of diborane mixed gas
  • Preparation system and preparation method of diborane mixed gas
  • Preparation system and preparation method of diborane mixed gas

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Embodiment Construction

[0021] Preferred embodiments of the present invention are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principles of the present invention, and are not intended to limit the protection scope of the present invention.

[0022] Such as Figure 1-2 Shown, a kind of diborane mixed gas preparation system, described preparation system comprises diborane cylinder 1, inflation main line 2, vacuum system 3, cryogenic cold trap 4 and temperature control inflation device 5, described diborane The gas bottle 1 is connected to the main inflation line 2 and the gas venting line 9 through the gas pipe one 11, and the recovery gas cylinder 43 is placed in the cryogenic cold trap 4, and the recovery gas bottle 43 is connected to the gas inflation main line 2 through the gas pipe two 41 , a number of target filling gas cylinders 51 are placed in the temperature control infla...

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Abstract

The invention discloses a preparation system and a preparation method of diborane mixed gas, and relates to the technical field of preparation systems and preparation methods of diborane mixed gas. The preparation system comprises a diborane gas cylinder, a main inflation pipeline, a vacuum system, a low-temperature cold trap and a temperature control inflation device, the diborane gas cylinder is connected to the main inflation pipeline through a first gas pipe, a recovery gas cylinder is placed in the low-temperature cold trap and connected to the main inflation pipeline through a second gas pipe, and the temperature control inflation device is connected to the vacuum system. A plurality of target filling gas cylinders are placed in the temperature control gas filling device, each target filling gas cylinder is connected to a gas filling main pipeline through a third gas pipe, and the joint between the first gas pipe and the gas filling main pipeline is connected to a vacuum system through a vacuum pipeline. In the process of preparing the diborane mixed gas, the mixed gas is cooled by using the low-temperature liquid, so that the preparation efficiency of the diborane mixed gas can be remarkably improved, the influence of temperature on the stability of diborane can be eliminated, and the diborane mixed gas can be recycled.

Description

technical field [0001] The invention relates to the technical field of diborane mixed gas preparation, in particular to a diborane mixed gas preparation system and a preparation method thereof. Background technique [0002] Diborane (B2H6) is one of the special gases that play an important role in the electronic semiconductor and photovoltaic industries. It is generally used as a mixed gas diluted with nitrogen or hydrogen. During the preparation of the mixed gas, when nitrogen or hydrogen gas is added, the temperature of the gas in the cylinder will rise significantly. [0003] Diborane gas is unstable at higher temperatures and decomposes to produce other substances (hydrogen and higher borane), which will affect the content and purity of diborane mixed gas. [0004] In the prior art, for the temperature rise during the filling process, the method of natural cooling of the production ambient air is generally adopted, and the waiting time reduces the production efficiency ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01F23/10B01F35/22B01F35/80
Inventor 赵文军
Owner 沧州华宇特种气体科技有限公司
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