Method and device for reconstructing electron orbit space distribution and electron beam function

Abstract

The invention discloses a method and device for reconstructing electron orbit space distribution and an electron beam function, and the method comprises the steps: controlling a mobile electron beam to scan a sample, and obtaining the diffraction intensity of each scanning position of the sample; initializing a sample transmission function and an electron beam function, establishing a forward propagation model containing to-be-optimized parameters according to the diffraction intensity, the sample transmission function and the electron beam function, and calculating a loss function value; the derivative of the loss function about the to-be-optimized parameter is solved, the gradient of the to-be-optimized parameter in the sample transmission function and the electron beam function is obtained, the to-be-optimized parameter is optimized according to the gradient, the loss function value is updated, the iteration process is repeated until the iteration termination condition is met, and the optimized sample transmission function and the optimized electron beam function are output. According to the embodiment of the invention, the resolution of sub-pixel precision can be realized, and parameterized information such as atomic position and electron orbit space distribution can be directly obtained on the basis of keeping the advantages of traditional laminated imaging.

Description

Technical field [0001] The application relates to the technical field of imaging, in particular to a method and a device for reconstructing the spatial distribution of electron tracks and the electron beam function. technical background [0002] Traditional electron microscopy imaging methods play an important role in characterizing the microstructure of materials. The existing laminated imaging methods can obtain the information of electron beam function, sample amplitude and phase, etc. However, these imaging methods only obtain intuitive image information, but can't directly obtain accurate parametric information, such as atomic position, orbital occupation, etc. Inventive content [0003] The application provides a method, a device, electronic equipment and a storage medium for reconstructing the spatial distribution and electron beam function of an electron track, so as to solve the problem that the related technology can only obtain the intuitive image information of a sam...

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Problems solved by technology

[0003] This application provides a method, device, electronic equipment, and storage medium for reconstructing the spatial distribution of electron orbitals and electron beam functions, so as to solve the problem that related technologies can only obtain intuitive image information of samples, and cannot parametrically represent atomic positions and orbital occupancy. The problem

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