Control configuration system self-adaptive to industrial argon purification and recovery fluctuation
A recovery system and configuration control technology, applied in refrigeration and liquefaction, solidification, lighting and heating equipment, etc., can solve the problems of automatic adjustment, lack of coordination of gas supply system, low degree of intelligence, etc., to reduce labor costs, The effect of improving the economical efficiency of equipment operation and improving the degree of intelligence
Pending Publication Date: 2022-05-13
SOUTHEAST UNIV
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Problems solved by technology
For example: the patent of recovery and purification method and device for argon tail gas (CN202110833531.9) only proposes a scheme for recovering and purifying industrial argon tail gas containing a large amount of oxygen, but this scheme cannot be based on the gas consumption of the argon gas user side. Fluctuations and gas composition fluctuations are automatically adjusted, lack of coordination among multiple gas supply systems, and the degree of intelligence is low
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[0018] In order to deepen the understanding of the present invention, the present invention will be further described below in conjunction with the accompanying drawings. This embodiment is only used to explain the present invention, and does not constitute a limitation to the protection scope of the present invention.
[0019] Figure 1-4 It shows a specific implementation of a control configuration system for adaptive industrial argon purification and recovery fluctuations:
[0020] Such as figure 1 As shown, the system includes a DSC control module system, an argon backup system, an industrial argon purification and recovery system and an argon user-side system. The argon backup system and the industrial argon purification and recovery system are respectively connected to the argon user-side system And it can deliver high-purity argon. The argon user side system can deliver crude argon with impurities to the industrial argon purification and recovery system. The DSC contro...
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A control configuration system self-adaptive to industrial argon purification and recovery fluctuation comprises a DSC control module system, an argon backup system, an industrial argon purification and recovery system and an argon user side system, and the argon backup system and the industrial argon purification and recovery system are connected with the argon user side system and convey high-purity argon. The argon user side system can convey crude argon with impurities to the industrial argon purification and recovery system, and the DSC control module system is electrically connected with the argon backup system, the industrial argon purification and recovery system and the argon user side system. And the DSC control module system can receive and feed back sensor signals of the argon backup system, the industrial argon purification and recovery system and the argon user side system. Based on decentralized control of a DSC control module system, through switching of system gas supply modes under argon requirements of different user sides, self-adaptive response to flow fluctuation and gas component fluctuation of argon consumption is achieved, and stable operation of full-automatic on-site unattended equipment is guaranteed.
Description
technical field [0001] The invention relates to the technical field of industrial argon purification and recovery, in particular to a control configuration system adaptive to industrial argon purification and recovery fluctuations. Background technique [0002] At present, argon is used more and more in semiconductor processing, new energy and other industries. At the same time, with the improvement of people's requirements for product quality, the requirements for the purity of argon are also getting higher and higher. For example, the argon gas used in the production process of photovoltaic silicon must have a purity volume fraction of 99.999%. At present, it mainly relies on the production of air separation devices. Due to the low content of argon in the air, the production capacity of argon is seriously insufficient. On the other hand, the direct discharge of used argon in the production process has caused a huge waste of argon. [0003] Industrial argon purification an...
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Login to View More IPC IPC(8): F25J3/02
CPCF25J3/0285
Inventor 岳峥王晨卞咏张小松薛鲁肖龙昆黄岩岩周发州
Owner SOUTHEAST UNIV