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Manufacturing method of surface acoustic wave sensor

A production method and surface acoustic wave technology, applied in the field of sensors, can solve the problems of high production cost and the like, achieve the effects of improving production efficiency and being beneficial to popularization and use

Pending Publication Date: 2022-05-24
西安聚安光科物联网科技有限公司
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  • Abstract
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  • Claims
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Problems solved by technology

[0004] In order to overcome the deficiencies in the prior art, the object of the present invention is to provide a method for manufacturing a surface acoustic wave sensor to solve the technical problem that the high temperature resistant surface acoustic wave sensor is expensive to manufacture

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  • Manufacturing method of surface acoustic wave sensor
  • Manufacturing method of surface acoustic wave sensor

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Embodiment Construction

[0025] In order to solve the technical problems of the present invention, technical solutions and beneficial effects more clearly understood, the following in conjunction with the accompanying drawings and embodiments, the present invention will be further elaborated in detail. It should be understood that the specific embodiments described herein are merely used to explain the present invention and are not intended to qualify the present invention.

[0026]It should be noted that when a component is said to be "fixed to" or "set to" another component, it can be directly on another component or indirectly on that other component. When a component is said to be "connected to" another component, it can be either directly connected to another component or indirectly connected to the other component.

[0027] Further, the terms "first", "second" are for descriptive purposes only and cannot be construed as indicating or implying relative importance or implicitly indicating the number o...

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Abstract

The invention relates to the technical field of sensors, and provides a method for manufacturing a surface acoustic wave sensor, which comprises the following steps of: a, photoetching; b, developing to form an interdigital electrode and reflective gratings arranged on two sides of the interdigital electrode; step c, film coating; d, the wafer is plated with a diamond film layer by means of alignment of a nesting plate and a mask plate; step f, uniformly coating the back plate of the nesting plate with a nano particle coating layer, and coating the round crystal with the nano particle coating layer; and step e, drying the wafer in a temperature control box so as to cure the nanoparticle coating layer. Compared with the prior art, batch production of the high-temperature-resistant surface acoustic wave sensor can be realized, the production efficiency is improved, and popularization and application of the high-temperature-resistant surface acoustic wave sensor are facilitated.

Description

Technical field [0001] The present invention relates to the field of sensor technology, specifically to a method of making a surface acoustic wave sensor. Background [0002] Surface acoustic wave temperature sensor is a passive wireless sensor, widely used, in aerospace and other fields have important application value. The surface acoustic wave temperature sensor is mounted directly on the surface of the object under test and returns the RF signal with temperature information to the reader after receiving the probe RF signal. Current surface acoustic wave temperature sensors are difficult to withstand high temperatures, and are easily catalyzed above 500 degrees Celsius, which cannot meet the requirements of high temperature measurement. [0003] The passive high temperature sensors produced by existing manufacturers are mainly optical fiber sensors, which are expensive and limit their application range. Contents of the Invention [0004] In order to overcome the shortcomings ...

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Application Information

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IPC IPC(8): G01K11/26
CPCG01K11/265Y02P70/50
Inventor 董波
Owner 西安聚安光科物联网科技有限公司
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