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Guided mode resonance narrow-band filtering unit structure and multispectral chip

A narrow-band filtering and guided-mode resonance technology is applied in the field of guided-mode resonance narrow-band filtering unit structures and multi-spectral chips, which can solve the problems of complicated filter preparation process and high cost, and achieve easy batch preparation, high batch production cost, high cost, and high cost. Excellent performance

Pending Publication Date: 2022-06-28
XIAN RUIXIN MICROELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] The second is that the existing filter preparation process is complicated and the cost is high;

Method used

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  • Guided mode resonance narrow-band filtering unit structure and multispectral chip
  • Guided mode resonance narrow-band filtering unit structure and multispectral chip
  • Guided mode resonance narrow-band filtering unit structure and multispectral chip

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0060] like figure 1 , figure 2 A guided-mode resonance narrow-band filter unit structure is shown, which includes a metal grating layer, a buffer layer, a waveguide layer and a substrate stacked in sequence from top to bottom, and the guided-mode resonance filter unit includes a groove and a column,

[0061] The top of the guided mode resonance narrow-band filter unit structure is the sub-wavelength metal grating layer, and the bottom is the buffer layer, the waveguide layer and the substrate are dielectric materials, wherein the refractive index of the waveguide layer material is higher than two. The buffer layer and the substrate at the end, the buffer layer, the waveguide layer and the substrate together constitute a waveguide structure.

[0062] When the matching conditions of the grating wave vector are met, the incident light wave will resonate with the guided mode supported by the waveguide, forming a guided mode resonance. At the same time, it is periodically modula...

Embodiment 2

[0076] On the basis of the guided-mode resonance narrow-band filter unit structure described in Embodiment 1, the groove penetrates the metal grating layer, the buffer layer, and the waveguide layer to form a number of pillars standing on the substrate . At this time, the structure of the guided-mode resonance narrow-band filtering unit structure can be divided into three cases. The first case is that the metal grating layer of the guided-mode resonance narrow-band filtering unit structure is a one-dimensional metal grating layer, and the above-mentioned substrate is above the metal grating layer. All layers are divided into the strips by the grooves; the second case is that the metal grating layer is a two-dimensional metal grating layer, and all the layers above the substrate are divided into the pillars by the grooves ,like figure 1 , figure 2 shown. The third case: each layer above the substrate is divided into the column or the strip by the groove, and the other part ...

Embodiment 3

[0078]On the basis of the guided-mode resonance narrow-band filter unit structure described in Embodiment 1, the groove penetrates the metal grating layer, the buffer layer, and the waveguide layer to form a number of pillars standing on the substrate . At this time, the structure of the guided mode resonance narrow-band filter unit structure is as follows: all the layers above the base are divided into the pillars by the groove. On the basis of the above-mentioned form, there are two situations for the column. The first situation is that the distance between two adjacent columns in the horizontal or vertical direction is equal; in the second situation, the distance between the two adjacent columns in the horizontal or vertical direction is equal. not equal. In the second case, it may be that the distance between adjacent columns in the lateral direction is greater than the distance between adjacent columns in the longitudinal direction, or the distance between adjacent colum...

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Abstract

The invention discloses a guided-mode resonance narrow-band filtering unit structure and a multispectral chip. The guided-mode resonance narrow-band filtering unit structure comprises a metal grating layer, a buffer layer, a waveguide layer and a substrate which are stacked in sequence from top to bottom, the metal grating layer is a one-dimensional metal grating layer or a two-dimensional metal grating layer, and the guided-mode resonance narrow-band filtering unit structure is characterized in that grooves in the metal grating layer extend downwards to divide the layers above the substrate, and the grooves in the metal grating layer extend downwards to divide the layers above the substrate. And for the one-dimensional metal grating layer, each layer above the substrate is divided into a plurality of mutually parallel strips, and for the two-dimensional metal grating layer, each layer above the substrate layer is divided into a plurality of cylinders. The guided-mode resonance narrow-band filtering unit structure is applied to the multispectral chip. According to the invention, the filtering unit based on the guided mode resonance technology is adopted, the effects of high transmittance, narrow bandwidth, strong secondary peak suppression, wide spectral range and easy batch preparation can be achieved at the same time, and the application of the multi-spectral chip based on the guided mode resonance technology to mobile devices such as smart phones becomes reality.

Description

technical field [0001] The invention relates to the field of optical filters and chips, in particular to a guided-mode resonance narrow-band filter unit structure and a multispectral chip. Background technique [0002] Traditional mobile phone image sensors are mainly used to acquire grayscale geometric images, but cannot acquire multi-spectral information, so functions such as true color recovery or substance identification through multi-spectral attributes cannot be realized. Traditional multispectral imagers rely on prismatic dispersion, acousto-optic tunability, interference and other spectroscopic techniques. Multispectral imaging systems are bulky and bulky, with high manufacturing costs and complex optical paths. In contrast, on-chip multispectral imaging technology using micro-nanostructures as filter elements has unique advantages such as small size, light weight, high integration, and low cost, which can just meet the requirements of miniaturization, light weight, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/20H01L27/146
CPCG02B5/201H01L27/14625
Inventor 郑宏志
Owner XIAN RUIXIN MICROELECTRONICS CO LTD