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Correction method of LCD strip-shaped target material assembly

A calibration method and target material technology, applied in the direction of forming tools, manufacturing tools, metal processing equipment, etc., to achieve the effect of improving calibration efficiency and high yield

Pending Publication Date: 2022-07-15
广东江丰电子材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Compared with the correction method of applying pressure at the center in the prior art, the correction method of the present invention applies pressure to both ends of the LCD bar-shaped target assembly, which can effectively solve the problem of the metal target due to thermal expansion and contraction. Different degrees of deformation, ensuring that the overall flatness of the LCD strip target assembly is within the acceptable range, greatly improving the calibration efficiency and high yield

Method used

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  • Correction method of LCD strip-shaped target material assembly
  • Correction method of LCD strip-shaped target material assembly
  • Correction method of LCD strip-shaped target material assembly

Examples

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Effect test

Embodiment 1

[0065]This embodiment provides a calibration method for an LCD bar-shaped target assembly, and the calibration method includes the following steps:

[0066] (1) Place the LCD strip target assembly with a temperature of 110°C flat on the calibration platform in a U shape, control the temperature of the calibration platform to be 110°C, along the length direction of the LCD strip target assembly, close to Two first spacers are arranged symmetrically inside and along the center line, and two second spacers are arranged near the end and symmetrically along the center line. Both the first spacer and the second spacer are placed on the LCD bar. between the shaped target component and the calibration platform, and the thickness of the first spacer is greater than the thickness of the second spacer;

[0067] Wherein, the target material in the LCD bar-shaped target material assembly is a titanium target material, and the back plate is a copper-chromium alloy back plate of model C18200...

Embodiment 2

[0071] This embodiment provides a calibration method for an LCD bar-shaped target assembly, and the calibration method includes the following steps:

[0072] (1) Place the LCD bar-shaped target assembly with a temperature of 100°C flat on the calibration platform in a U shape, control the temperature of the calibration platform to be 100°C, along the length direction of the LCD bar-shaped target assembly, close to Two first spacers are arranged symmetrically inside and along the center line, and two second spacers are arranged near the end and symmetrically along the center line. Both the first spacer and the second spacer are placed on the LCD bar. between the shaped target component and the calibration platform, and the thickness of the first spacer is greater than the thickness of the second spacer;

[0073] Wherein, the target material in the LCD bar-shaped target material assembly is a molybdenum target material, and the back plate is a copper-nickel-chromium alloy back p...

Embodiment 3

[0077] This embodiment provides a calibration method for an LCD bar-shaped target assembly, and the calibration method includes the following steps:

[0078] (1) Place the LCD bar-shaped target assembly with a temperature of 100°C flat on the calibration platform in a U shape, control the temperature of the calibration platform to be 100°C, along the length direction of the LCD bar-shaped target assembly, close to Two first spacers are arranged symmetrically inside and along the center line, and two second spacers are arranged near the end and symmetrically along the center line. Both the first spacer and the second spacer are placed on the LCD bar. between the shaped target component and the calibration platform, and the thickness of the first spacer is greater than the thickness of the second spacer;

[0079] Wherein, the target material in the LCD bar-shaped target material assembly is an aluminum target material, and the back plate is a copper-zinc alloy back plate of mode...

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Abstract

The invention provides a correction method of an LCD (Liquid Crystal Display) strip-shaped target component, which comprises the following steps of: flatly placing the LCD strip-shaped target component on a correction platform in a U shape, pressurizing two ends of the LCD strip-shaped target component, cooling to room temperature, and removing the pressure. Compared with a correction method of applying pressure to the center in the prior art, the correction method disclosed by the invention is used for pressurizing the two ends of the LCD strip-shaped target material assembly, so that the problem of deformation of different degrees of the metal target material due to thermal expansion and cold contraction effects can be effectively solved, and the overall flatness of the LCD strip-shaped target material assembly is ensured to be within a qualified range; the correction efficiency is greatly improved, and the yield is high.

Description

technical field [0001] The invention relates to the technical field of liquid crystal display panels, in particular to a calibration method for an LCD strip target assembly. Background technique [0002] The metal sputtering target is a material used as a cathode in the sputtering deposition technology. Under the impact of positively charged cations in the sputtering machine, the metal on the surface of the metal sputtering target is separated from the cathode in the form of molecules, atoms or ions. Redeposited on the anode surface. Since metal sputtering targets are often made of high-purity aluminum, copper, titanium, nickel, tantalum and other relatively precious metal materials, and the strength of metal sputtering targets is different, in the actual application process, it is necessary to meet the performance requirements. The metal sputtering target is combined with a backing plate with a certain strength to form a target assembly, which is then installed on the sput...

Claims

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Application Information

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IPC IPC(8): B21D1/00B21D1/10B21D37/16
CPCB21D1/10B21D1/00B21D37/16
Inventor 姚力军潘杰王学泽施凯煜范文新周伟君
Owner 广东江丰电子材料有限公司