Automated customized coating boat flapping device

Abstract

The invention discloses an automatic customized coating boat flapping device which comprises a boat supporting transportation table, a boat supporting track used for moving and transporting a graphite boat is arranged on the boat supporting transportation table, a boat flapping plate used for flapping the graphite boat is arranged at the position, close to the boat supporting track, of the boat supporting transportation table, and a supporting top plate used for supporting the boat supporting plate is arranged on the boat supporting transportation table. The driving unit is used for driving the boat beating plate, the supporting and protecting unit is used for protecting the graphite boat from shaking, and the blocking unit is used for conducting falling piece detection on chippings generated by shaking of the boat beating device, so that the operation mode of manual boat beating is omitted, the customized boat beating device is installed, falling piece detection and collection are added, and the working efficiency is improved. The automatic main machine table is in linkage with the automatic boat beating mechanism, automatic boat beating and the full-automatic circulation function of the system are achieved, and the influences of productivity and yield caused by omission of beating, untimely boat beating and the like are effectively reduced.

Description

technical field [0001] The invention relates to the field of photovoltaic production equipment, in particular to an automated custom-made coating boat beater. Background technique [0002] PECVD is a relatively important process in solar cells. PECVD system is a series of generators using parallel plate coating boats and high-frequency plasma exciters. In the case of low pressure and elevated temperature, the plasma generator is directly installed in the middle of the coated plate to react. The reactive gases used were silane SiH4 and ammonia NH3. These gases act on the silicon nitride stored on the silicon wafer. Different refractive indices can be obtained by changing the ratio of silane to ammonia. During the deposition process, a large amount of hydrogen atoms and hydrogen ions are produced, which makes the hydrogen passivation of the wafer very good. [0003] The graphite boat is a graphite mold, and the graphite boat is a graphite crucible, which is used to cast go...

AI Technical Summary

Problems solved by technology

[0004] At present, the loading and unloading of graphite boats is done by manual padding. Employees need to run back and forth, which is time-consuming and labor-intensive. Manual padding is not easy to control, and it is easy to damage the leaves of the boat. If the paddle is not in place, it will easily cause warping and high frequency; The self-made boat shooting device has been used for a long time, the tape is easy to fall off and fall into the boat, polluting the film source, and if it is not found in time, it will lead to an increase in the consumption of the screen plate, and the manual shooting of the boat is too large, affecting the surrounding environment of the graphite boat and affecting the yield rate

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