Workpiece flushing device for scribing machine and scribing machine

A washing device and a dicing machine technology, which are applied in the direction of cleaning methods using liquids, cleaning methods and utensils, chemical instruments and methods, etc., can solve the problems of poor washing effect and large space occupation of cleaning devices, and facilitate equipment maintenance , Occupy a small space, improve the effect of flushing effect

Active Publication Date: 2022-07-22
沈阳和研科技股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the embodiments of the present invention is to provide a workpiece washing device and a dicing machine for a dicing machine, so as to solve the problems that the cleaning device of the existing dicing machine has poor cleaning effect and occupies a large space

Method used

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  • Workpiece flushing device for scribing machine and scribing machine
  • Workpiece flushing device for scribing machine and scribing machine
  • Workpiece flushing device for scribing machine and scribing machine

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Embodiment Construction

[0041] The technical solutions of the present invention will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0042]It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It should also be understood that terms, such as those defined in a general dictionary, should be understood to have meanings consistent with their meanings in the context of the prior art and, unless specifically defined as herein, should not be inter...

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PUM

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Abstract

The invention relates to the technical field of semiconductor cutting, and provides a workpiece washing device for a scribing machine and the scribing machine, and the workpiece washing device comprises at least one water curtain pipe assembly; the water curtain pipe assembly comprises a water curtain pipe, a first water inlet connector and a second water inlet connector, the water curtain pipe comprises a pipe sleeve and a water passing pipe assembly embedded in the pipe sleeve. The water inlet connectors are arranged at the two ends of the water curtain pipe correspondingly, the water flow stroke can be shortened, and therefore the pressure difference in the length direction of the water curtain pipe is reduced; meanwhile, flow channels with different lengths are arranged to be communicated with different water spraying holes in a sealed mode, so that independent closed flow channels with balanced pressure are provided for the water spraying holes in different areas, it is guaranteed that the water outlet pressure of the water spraying holes is balanced, the washing effect is improved, meanwhile, workpieces can be effectively protected against damage, and the service life of the workpieces is prolonged. And the flushing device is more compact in overall structure and small in occupied space, and reasonable layout of parts on the scribing machine is facilitated.

Description

technical field [0001] The invention relates to the technical field of semiconductor cutting, in particular to a workpiece washing device used for a dicing machine and a dicing machine. Background technique [0002] In the process of semiconductor device processing, on the rectangular or circular surface, a plurality of parts are divided by horizontal and vertical grids (cut lines), each part is an IC (Integrated Circuit) or LSI (Large Scale Integration) device. , and then cut along the cutting path to separate each part to make a chip, this dicing processing equipment is also called a precision grinding wheel cutting machine (referred to as a dicing machine). [0003] The dicing machine will leave cutting powder on the surface of the workpiece during the cutting process, and a corresponding workpiece washing device needs to be set up to clean the powder. The cleaning of the existing dicing machine is mainly a built-in or externally arranged rotatable cutting table device, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B3/02
CPCB08B3/02B08B2203/0217
Inventor 张明明石文王晓禹徐双双吴洪柏
Owner 沈阳和研科技股份有限公司
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