Furnace tube for three-tube-cooperation high-temperature-resistant high-vacuum
A high vacuum, tube furnace technology, applied in furnaces, furnace components, lighting and heating equipment, etc., can solve the problem that the quartz tube metal tube is difficult to meet high temperature and high vacuum requirements at the same time, and achieve easy replacement and good air tightness. , the effect of low price
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[0012] The present invention will now be further described with reference to the accompanying drawings.
[0013] like figure 1 As shown, the furnace tube includes an outer tube 1, a middle tube 4, and an inner tube 5. The outer tube is a corundum tube, the middle tube is a stainless steel tube, and the inner tube is a corundum tube or a quartz tube. The outer pipe is a straight pipe with open ends at both ends, and both ends of the outer pipe are sealed and connected to flange joints, which are respectively the left flange joint 2 and the right flange joint 3. The left flange joint is provided with an inflation port 201, and the right flange joint is provided It is welded with the left disk of the first vacuum clamp 6 to form a seal. The middle tube is closed at one end and open at the other end. A section of the closed end is located in the outer tube, and a gap is formed between this section and the outer tube, and the middle tube extends out of a section of the outer tube. ...
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Abstract
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