Displacement sensor based on coaxial laser triangulation method and microscopic imaging and application
A technology of laser triangulation and displacement sensor, which is applied in the field of sensors, can solve the problems of insufficient precision of displacement measurement technology and the inability to realize high-precision measurement of fine features of the measured surface, and achieve the effect of saving measurement cost and simple structure
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Embodiment 1
[0044] figure 1 It is a schematic diagram of the principle of the first embodiment of the present invention; as figure 1 As shown in the figure, a high-precision displacement sensor based on coaxial laser triangulation and microscopic imaging of the present invention includes a casing, wherein the casing is provided with an optical path structure, and the optical path structure includes a laser module 101, 50 / 50 beam splitter 102, first mirror 103, first microscope objective 104, first photosensitive element 105, wherein:
[0045] The outgoing light of the laser module 101 enters the 50 / 50 beam splitter 102 vertically, the light beam enters the first microscope objective lens 104 horizontally through the first reflecting mirror 103, and the incident light is focused by the first microscope objective lens 104 and then irradiates on the first measured object. On the plane 106, the generated reflected light and scattered light are received by the first microscope objective lens ...
Embodiment 2
[0066] figure 2 It is a schematic diagram of the principle of the second embodiment of the present invention; as figure 2 As shown, a high-precision displacement sensor based on coaxial laser triangulation and microscopic imaging of the present invention further includes a second mirror 202, a third mirror 203, a second microscope objective 204, a second photosensitive element 205, of which:
[0067] The outgoing beam of the laser module 101 is vertically incident on the 50 / 50 beam splitter 102 to form two beams I and II with an included angle of 90°. A microscope objective lens 104 is focused and irradiated on the first measured plane 106, and the generated emitted light and scattered light are received by the first microscope objective lens 104 and form a horizontal outgoing beam, which passes through the first mirror 103 and 50 / 50 beam splitting in sequence After the mirror 102 acts, it is vertically irradiated on the photosensitive area of the first photosensitive el...
Embodiment 3
[0071] image 3 It is a schematic diagram of the principle of the second embodiment of the present invention; as image 3 As shown, this embodiment is another form on the basis of Embodiment 2, and other structures are the same as those of Embodiment 2, except that the first microscope objective lens 104 and the second microscope objective lens 204 are coaxially opposite to each other. Setting; used to determine parameters such as the outer diameter of the pipe and the wall thickness of the components.
[0072] This implementation is as follows: Figure 4 As shown, a high-precision displacement sensor based on coaxial laser triangulation and microscopic imaging has two opposite measurement beam exit points, which is suitable for parts thickness detection and so on. The optical path structure of the sensor includes a laser module 101, a 50 / 50 beam splitter 102, a second mirror 202, a third mirror 203, a second microscope objective 204, and a second photosensitive element 205,...
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