Micro-relay
A relay and electrode technology, applied in the field of microstructure, can solve the problems of reducing the miniaturization degree of relay products, and the inappropriate miniaturization of electromechanical relays.
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[0015] The present invention relates to the fabrication of microstructures. In particular, the invention relates to relays formed from microstructures. The use of microstructures enables the production of miniaturized relays.
[0016] Figure 1A to Figure 1B They are respectively a cross-sectional view and a plan view of a micro relay according to an embodiment of the present invention. As shown, the relay includes a body 110 . The body includes a support element 160 . The support member is supported by the main body at the first end 163, forming a cantilever. The first contact area 133 is arranged near the support element second end 165 . The first contact area includes a first contact 131 .
[0017] A gap separates the top surface 168 of the support member from the surface 109 of the body, forming the cavity 121 . The cavity allows the support element to rotate about the first end 163 . The surface 109 includes a contact area 134 on which the second contact 130 is dis...
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Abstract
Description
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Application Information
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