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Valve less thin film driven micro pump

A film-driven, micro-pump technology, used in pumps, machines/engines, pumps with flexible working elements, etc., can solve problems such as unstable flow, and achieve the effects of fast response, strong controllability, and continuous and stable output flow

Inactive Publication Date: 2005-12-21
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to overcome the deficiencies of the prior art and provide a valveless film-driven micropump, which is a single-membrane double-chamber structure, which can effectively solve the problems of periodic fluctuations and flow instability , so that the output flow is continuously stable

Method used

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  • Valve less thin film driven micro pump
  • Valve less thin film driven micro pump
  • Valve less thin film driven micro pump

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Embodiment Construction

[0014] Such as figure 1 , figure 2 , image 3 As shown, an upper pump chamber 4, a tapered diffuser tube 3, a tapered shrink tube 7, a left water hole 2 and a right water hole 8 are opened on the upper pump body 1, and on the surface of the basement membrane 5 of the upper pump body 1 A layer of functional film 6 is provided to form a driving film, which may be a piezoelectric film or a magnetoelectric film. The upper pump chamber 4 is connected with the water hole 2 through the diffuser tube 3 and connected with the water hole 8 through the shrink tube 7 . There is a lower pump body 13 below the upper pump body 1, and a corresponding lower pump chamber 11, a tapered diffuser tube 12, a tapered shrink tube 10, and corresponding water holes 2 and water holes 8 are opened on the lower pump body 13. The pump chamber 11 is connected with the water hole 2 through the diffuser tube 12 and connected with the water hole 8 through the shrink tube 10 . The upper and lower pump cham...

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Abstract

The invention discloses a valveless membrane-driven micropump. The micropump is a single-membrane double-cavity structure. The driving membrane composed of a basement membrane and a functional membrane is completely isolated in the middle of the double-cavity. Each pump chamber passes through its own cone. The shaped diffuser tube is connected with the water inlet hole, and is connected with the water outlet hole through respective tapered shrinkage tubes. The invention adopts a single-membrane double-cavity structure, and uses signals to control the volume changes of the two cavities, so that the volume changes of the two cavities can be complemented in real time, the output flow is stable, and it has the advantages of simple structure and preparation process, fast response, wide driving frequency, Strong controllability, low energy consumption, long life and so on. In addition, the present invention can be manufactured using materials and processes compatible with micromachining and micromechanical technology, and has the characteristics of small size, low cost, easy integration with other micro-detection and micro-control elements, etc., and is suitable for mass production and has considerable application prospect.

Description

technical field [0001] The invention relates to a film-driven micropump, which belongs to microfluidic transmission and control, micromechanical [0002] technology field. Background technique [0003] The microfluidic control system can accurately detect and control the flow rate of microliters per minute, and has important application prospects in micro-delivery of drugs, micro-injection of fuel, cell separation, cooling of integrated electronic components, and microchemical analysis. As an important microfluidic actuator, the micropump is an important symbol of the development level of the microfluidic system. At present, the membrane-driven micropump is widely used, and its flow control is realized by changing the volume of the pump cavity caused by the reciprocating motion of the driving membrane. The driving principles of the driving membrane include piezoelectric, electrostatic, electromagnetic, thermopneumatic, bimetallic effect and shape memory effect driving. Am...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04B43/04
Inventor 于军王耘波徐静平刘锋高俊雄刘刚周文利谢基凡
Owner HUAZHONG UNIV OF SCI & TECH
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