Scanning electronic microscope standard substance and its making method

Abstract

The invention relates to a standard substance used for calibrating the magnification of a scanning electron microscope and a preparation method thereof. Its substrate is coated with a measuring film, and the measuring film is coated with a conductive layer. The measuring film is an array of monodisperse polystyrene standard particles closely arranged in hexagons, and a substrate is placed on the sample holder. a. Select the aqueous solution of monodisperse polystyrene standard particles and select the substrate; b. Clean the substrate; c. Sprinkle the aqueous solution of monodisperse polystyrene standard particles on the substrate; ° put into the clean room and dry naturally; e. the substrate is embedded in the sample holder; f. the aqueous solution of monodisperse polystyrene standard particles adsorbed on the substrate and dried is coated with a conductive layer with an ion sputtering instrument, and the conductive layer is It is a gold layer, the purity of the gold layer is at least 99%, and the thickness of the gold layer is 5nm-20nm. The invention expands the calibration range of the scanning electron microscope, and can provide the traceability value within the calibration range and the uncertainty of a given confidence interval.

Description

technical field [0001] The invention relates to the technical field of measurement and test standard value transfer, in particular to a standard substance (standard sample) for calibrating the magnification of a scanning electron microscope and a manufacturing method thereof. Background technique [0002] Today, as human society enters the 21st century, with the rapid development of nanotechnology worldwide, nanotechnology has been widely used in laboratory basic scientific research, data collection for product development and quality control in the production process. Now many quality assurance systems, such as the ISO9000 series, require that the data obtained should have traceability values. At the same time, the resolution of the scanning electron microscope, which is an important means of observing nanostructures, is getting higher and higher, which requires that the image data at higher and higher magnifications also have traceable values. However, the current commerc...

AI Technical Summary

Problems solved by technology

When the magnification exceeds 20,000 times, the final imaging pitch of 4.6 μm pitch is greater than 9 cm, which has exceeded the format (ie scanning range) of the final imaging photo of a general scanning electron microscope, and the image of this magnification cannot be calibrated, so it cannot adapt to the current Increasingly Higher Resolution Requirements for Scanning Electron Microscopes

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