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Self-calibrating method and apparatus for ultra precise workbench

A workbench and self-calibration technology, which is applied in the direction of measuring devices, complex mathematical operations, instruments, etc., can solve the problems of limited application, difficult calibration of three-dimensional ultra-precision workbench, poor scalability, etc., so as to avoid modeling errors and use flexibly , low-cost effect

Active Publication Date: 2007-03-07
TSINGHUA UNIV +1
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Problems solved by technology

In addition, the proposed device is based on an electron beam pattern generator, which is only aimed at ultra-precision two-dimensional workbenches, and has poor scalability. It is very difficult to calibrate three-dimensional ultra-precision workbenches, which largely limits its application. application

Method used

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  • Self-calibrating method and apparatus for ultra precise workbench
  • Self-calibrating method and apparatus for ultra precise workbench
  • Self-calibrating method and apparatus for ultra precise workbench

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Embodiment Construction

[0031] The present invention will be described in detail below in conjunction with the accompanying drawings.

[0032] As shown in Figure 6, the ultra-precision workbench self-calibration device of the present invention includes an auxiliary measuring device 3 placed on the calibrated workbench 2, a positioning device placed above the auxiliary measuring device 3, and an image An image acquisition card for acquisition and preprocessing and a computer 8 storing programs related to the self-calibration algorithm of the ultra-precision workbench. The auxiliary measurement device 3 adopts a chrome-plated grid glass plate with a grid mark matrix, which has a simple structure, strong processing technology, and is convenient to adjust between different measurement positions, and has excellent operability.

[0033] The positioning device includes an optical assembly 6 for enlarging the grid on the chrome-plated grid glass plate and an XY plane positioning sensor 7 for precisely position...

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Abstract

The invention discloses an automatic calibration method and apparatus applied to three-dimensional ultra-sophisticated bench. The method is to set an automatic calibration model containing error message of grid glass sheets and calibrated bench through the medium of chromed grid glass sheets, and processes measured data of grid pip in different testing position to eliminate effects of position error of grid glass sheet grid pip. The invention also discloses an automatic calibration apparatus, comprising chromed grid glass sheets with grid pulser matrix, a positioning devise with optical components and XY plane position sensor, an image-gathering card and a computer storing related program.

Description

technical field [0001] The invention relates to an ultra-precision workbench, in particular to a self-calibration method and device for an ultra-precision workbench for integrated circuit processing and testing equipment, belonging to the field of ultra-precision processing and measurement. Background technique [0002] Ultra-precision worktables are widely used in integrated circuit processing and testing equipment, and play an extremely important role. For example, as the core component of the lithography machine, the ultra-precision workpiece stage (the mask stage and the silicon wafer stage of the lithography machine) carries the silicon wafer or the mask and moves according to the set speed and direction, and passes through the mask stage and the silicon wafer. The high-precision positioning and synchronization of the table realize the precise transfer of the mask image features to the silicon wafer. Therefore, the movement and positioning accuracy of the ultra-precisio...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B21/04G06F17/10
Inventor 汪劲松朱煜朱立伟尹文生段广洪
Owner TSINGHUA UNIV
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