Apparatus for measuring parallelity of laser beam
A technology for measuring laser and parallelism, which is applied in the field of laser, can solve the problems of expensive interferometer, large volume of interferometer, and large measurement influence, and achieve the effect of fast measurement, small instrument volume and low cost
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[0029] The present invention will be further described below in conjunction with drawings and embodiments.
[0030] Please refer to FIG. 1 first. FIG. 1 is a schematic structural diagram of an embodiment of the device for measuring the parallelism of laser beams according to the present invention. As can be seen from the figure, the composition of the device for measuring laser beam parallelism in the present invention is: a diaphragm 2, a converging lens 3, a half-mirror 4, a first cylindrical lens 5, and the first four-quadrant detection are arranged successively on the same optical axis. Device 7, in the reflected light direction of the half mirror 4, that is, the direction perpendicular to the optical axis is followed by the second cylindrical lens 6, the second four-quadrant detector 8, the first cylindrical lens 5 and the second cylindrical lens 6 are symmetrical about the splitting surface of the half mirror 4, and the signal output terminals of the first four-quadrant ...
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